Radiation hardened bipolar junction transistor
View Patent ↗A method of forming bipolar junction devices, including forming a mask to expose the total surface of the emitter region and adjoining portions of the surface of the base region. A first dielectric layer is formed over the exposed surfaces. A field plate layer is formed on the first dielectric layer juxtaposed on at least the total surface of the emitter region and adjoining portions of the surface of the base region. A portion of the field plate layer is removed to expose a first portion of the emitter surface. A second dielectric layer is formed over the field plate layer and the exposed portion of the emitter. A portion of the second dielectric layer is removed to expose the first portion of the emitter surface and adjoining portions of the field plate layer. A common contact is made to the exposed first portion of the emitter surface and the adjoining portions of the field plate layer. In another embodiment, the field plate and emitter contact are formed simultaneously.
1. An integrated circuit including at least one bipolar junction transistor, wherein the bipolar transistor comprises:
a base region in a surface of a collector region and an emitter region in the surface of the base region;
a field plate layer juxtaposed on and separated by a first dielectric layer from adjoining portions of the surface of the base and emitter regions; and
a common contact to a first portion of the emitter surface and a top and lateral surface of the juxtaposed adjoining portions of the field plate layer.
2. The integrated circuit according to claim 1 , including complementary bipolar transistors, each of which includes a field plate layer juxtaposed on and separated by a first dielectric layer from adjoining portions of the surface of the base and emitter regions; and a common contact to a first portion of the emitter surface and the juxtaposed adjoining portions of the field plate layer.
3. The integrated circuit according to claim 1 , including at least one insulated gate field effect transistor having source and drain regions in a channel region of the insulated gate field effect transistor; and wherein the first dielectric layer and the field plate layer also form the gate insulator and the gate, respectively, of the insulated gate field effect transistor.
4. The integrated circuit according to claim 1 , wherein the field plate layer is a polycrystalline silicon, and the contact is metal.
5. The integrated circuit according to claim 1 , wherein the first dielectric layer is a radiation hard layer.
6. The integrated circuit according to claim 1 , wherein the field plate layer and the contact are metal.
7. The integrated circuit according to claim 1 , wherein the first dielectric layer is a non-radiation hard layer.