Ridge-stripe semiconductor laser
View Patent ↗A laminated composite includes: a 1st-conductive-type cladding layer laid on a substrate; an active layer laid on the 1st-conductive-type cladding layer; and a ridge-stripe 2nd-conductive-type cladding layer laid on the active layer. A pair of films is disposed at the end faces of the laminated composite so as to oppose each other along the lamination direction. The paired films are formed to have different spectral reflectances from each other. The resonator structure is formed with the laminated composite and the paired films. When, in the length direction of the resonator, a side with one of the paired films which has a smaller spectral reflectance is the forward side and a side with the other film having a larger spectral reflectance is the backward side, the laminated composite is structured so that the optical confinement factor becomes smaller on the forward side than on the backward side.
1. A semiconductor laser having a resonator formed on a semiconductor substrate, the resonator including:
a 1 st cladding layer;
an active layer disposed on the 1 st cladding layer;
a 2 nd cladding layer disposed on the active layer and having a stripe ridge portion;
an insulating layer disposed on the 2 nd cladding layer so as not to cover an upper surface of the ridge portion; and
a front film and a rear film disposed on each end face of the resonator, wherein
the front film has a smaller reflectance than the rear film, and
the insulating layer includes, on a side close to the front film, a 1 st insulating film having a 1 st refractive index and, on a side close to the rear film, a 2 nd insulating film having a 2 nd refractive index, the 1 st refractive index being larger than the 2 nd refractive index.
2. The semiconductor laser of claim 1 , wherein
the 2 nd cladding layer is thicker on the side close to the front film than on the side close to the rear film.
3. The semiconductor laser of claim 1 , wherein
the 2 nd cladding layer includes one or more ridge portions in addition to the ridge portion, the ridge portions being in parallel one to another.
4. The semiconductor laser of claim 1 , wherein
the front film has an at least 15% smaller reflectance than the rear film.
5. The semiconductor laser of claim 4 , wherein
the reflectance of the front film is in a range of 0.01% to 50% inclusive, and
the reflectance of the rear film is in a range of 30% to 100% inclusive.
6. The semiconductor laser of claim 1 , wherein
the active layer is made of a III-V nitride semiconductor material.
7. The semiconductor laser of claim 1 , wherein
the active layer is made of an AlGaAs semiconductor material.
8. The semiconductor laser of claim 1 , wherein
the active layer is made of an AlGaInP semiconductor material.
9. The semiconductor laser of claim 1 , wherein
a length ratio of the 1 st insulating film between the 2 nd insulating film in a length direction of the resonator is 2:3.
10. The semiconductor laser of claim 1 , wherein
a ratio of the 1 st refractive index to the 2 nd refractive index is 2.23/1.49 or more.
11. The semiconductor laser of claim 1 , wherein
the 1 st refractive index is 2.23, and the 2 nd refractive index is 1.49.
12. The semiconductor laser of claim 1 , wherein
the 1 st insulating film is made of Ta 2 O 3 , and the 2 nd insulating film is made of SiO 2 .
13. The semiconductor laser of claim 1 , wherein
the insulating layer further includes a 3 rd insulating film between the 1 st insulating film and the 2 nd insulating film, and
the refractive index is set to decrease in an order of the 1 st insulating film, the 3 rd insulating film, and the 2 nd insulating film.