Methods of fabricating single-pole recording head having trapezoidal main pole and bevel angle promotion layer
View Patent ↗A method of fabricating a single-pole perpendicular magnetic recording head to contain a bevel angle promotion layer that facilitates the fabrication of the bevel angle in a trapezoidal main pole. The bevel angle promotion layer is made of a non-magnetic material that is softer than the material (e.g., Al 2 O 3 ) that normally underlies the main pole. In one embodiment, the bevel angle promotion layer is formed between an end of the yoke and the air bearing surface (ABS), with the top surface of the bevel angle promotion layer being substantially coplanar with the top surface of the yoke. In other embodiment the bevel angle promotion layer is integrated with a leading edge taper material, which is formed of a magnetic material, to broaden the magnetic flux path between the yoke and the main pole.
1. A method of fabricating a main pole of a magnetic recording head comprising:
forming a bevel angle promotion layer, by depositing a first material in an opening in a yoke layer of a second material, said first material eroding more readily than Al 2 O 3 when subjected to an ion milling process, wherein said forming of bevel angle promotion layer further comprises planarizing said bevel angle promotion layer and said yoke layer such that top surfaces of said bevel angle promotion layer and said yoke layer are substantially coplanar;
depositing a main pole layer over at least said bevel angle promotion layer; and
performing an ion milling process on said main pole layer so as to bevel the sides of said main pole layer.
2. The method of claim 1 further comprising:
forming an auxiliary pole layer of a magnetic material;
forming a back gap of a magnetic material in contact with said auxiliary pole;
forming a supporting layer, a top surface of said supporting layer being coplanar with a top surface of said back gap; and
forming said yoke layer above said top surfaces of said supporting layer and said back gap, said yoke layer having said opening over said supporting layer.
3. The method of claim 2 further comprising depositing a seed layer of said material of said bevel angle promotion layer on said supporting layer and wherein said forming the bevel angle promotion layer comprising plating said first material of said bevel angle promotion layer on said seed layer.
4. The method of claim 2 wherein said supporting layer comprises Al 2 O 3 .
5. The method of Claim 1 wherein said planarizing comprises chemical-mechanical polishing.
6. The method of claim 1 wherein said first material comprises a material selected from the group consisting of NiP, Rh, Ta, NiCr and Cd.
7. The method of claim 6 wherein said first material comprises NiCr.
8. The method of claim 1 wherein said first material comprises a nonmagnetic metallic material.
9. The method of claim 1 wherein:
said depositing of main pole layer comprises forming said main pole layer on said top surfaces of each of said bevel angle promotion layer and said yoke layer.
10. The method of claim 1 wherein:
subsequent to performance of said ion milling process, said main pole layer having a trapezoidal shape at an air bearing cross section.
11. The method of claim 10 further comprising:
cutting at least said main pole layer and said bevel angle promotion layer at said air bearing cross section to form an air bearing surface.