Perpendicular pole structure and method of fabricating the same
View Patent ↗A magnetic structure, such as a pole tip, and method for forming the same includes forming a pole tip layer of magnetic material. A layer of polyimide precursor material is added above the pole tip layer and cured. A silicon-containing resist layer is added above the layer of polyimide precursor material and patterned. The resist layer is exposed to oxygen plasma for converting the resist into a glass-like material. Exposed portions of the cured polyimide precursor material are removed for exposing portions of the pole tip layer. The exposed portions of the pole tip layer are removed for forming a pole tip. Chemical mechanical polishing (CMP) can then be performed to remove any unwanted material remaining above the pole tip.
1. A magnetic write head for perpendicular magnetic recording, comprising:
a substrate;
a magnetic write pole formed on the substrate, the magnetic write pole having first and second laterally opposed sides and having a trailing edge and a leading edge each extending between the first and second laterally opposed sides;
wherein the substrate has outward extending portions extending beyond the write pole, and wherein the outward extending portions taper in a leading direction as they extend outward from the write pole;
a non-magnetic refill layer formed over the outward extending portions of the substrate and extending laterally outward from the first and second sides of the write pole, the non-magnetic refill layer having a surface plane that extends at least to the trailing edge of the write pole and having first and second transition portions adjacent to the first and second sides of the write pole that extend beyond the trailing edge of the write pole;
wherein the surface plane of the refill layer is coplanar with the trailing edge of the write pole.
2. A magnetic write head as in claim 1 wherein the substrate comprises alumina.
3. A write head as in claim 1 wherein the refill layer contacts each of the first and second sides of the write pole.
4. A write head as in claim 1 wherein the refill layer comprises a material that is the same as a material of the substrate.
5. A write head as in claim 1 wherein the refill layer comprises a material that is different than a material of the substrate.
6. A magnetic write head for
perpendicular magnetic recording, comprising:
a substrate:
a magnetic write pole formed on the substrate, the magnetic write pole having first and second laterally opposed sides and having a trailing edge and a leading edge each extending between the first and second laterally opposed sides;
wherein the substrate has outward extending portions extending beyond the write pole, and wherein the outward extending portions taper in a leading direction as they extend outward from the write pole;
a non-magnetic refill layer formed over the outward extending portions of the substrate and extending laterally outward from the first and second sides of the write pole, the non-magnetic refill layer having a surface plane that extends at least to the trailing edge of the write pole and having first and second transition portions adjacent to the first and second sides of the write pole that extend beyond the trailing edge of the write pole;
wherein the non-magnetic refill layer does not extend over the trailing edge of the write pole.