Method and device for multi-color interferometric modulation
View Patent ↗Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
1. An array of light modulators, comprising:
at least three modulators arranged so as to form one resulting picture element;
each modulator comprising a mirror suspended over a cavity by supports, the supports formed such that each modulator corresponding to each color assumes a quiescent state corresponding to a cavity with a different dimension.
2. An array of light modulators, comprising:
a first modulator, said first modulator comprising a reflective element suspended over a first cavity by supports, wherein the first modulator assumes a quiescent state corresponding to a first color based on, at least in part, a first dimension of the first cavity;
a second modulator, said second, modulator comprising a reflective element suspended over a second cavity by supports, wherein the supports are formed such that the second modulator assumes a quiescent state corresponding to a second color based on, at least in part, a second dimension of the second cavity; and
a third modulator, said third modulator comprising a reflective element suspended over a second cavity by supports, wherein the supports are formed such that the third modulator assumes a quiescent state corresponding to a third color based on, at least in part, a third dimension of the third cavity.
3. The array of claim 2 , wherein each of the modulators are located on a single layer.
4. The array of claim 2 , wherein at least two of the modulators are located on separate layers.
5. The array of claim 2 , wherein the colors correspond to primary colors.
6. The array of claim 2 , wherein the dimension comprises the height of the cavity.
7. The array of claim 1 , wherein each of the modulators are located on a single layer.
8. The array of claim 1 , wherein at least two of the modulators are located on separate layers.
9. The array of claim 1 , wherein a first modulator corresponds to a first primary color, a second modulator corresponds to a second primary color, and a third modulator corresponds to a third primary color.
10. The array of claim 1 , wherein the dimension comprises a height of the cavity.
11. An array of light modulators, comprising:
first means for modulating light, wherein said first means comprises a first cavity with a first dimension and wherein said first means is associated with a first color based on, at least in part, the first dimension;
second means for modulating light, wherein said second means comprises a second cavity with a second dimension and wherein said second means is associated with a second color based on, at least in part, the second dimension; and
third means for modulating light, wherein said third means comprises a third cavity with a third dimension and wherein said third means is associated with a third color based on, at least in part, the third dimension.
12. The array of claim 11 , wherein each of the first light modulating means, the second light modulating means, and the third light modulating means are located on a single layer.
13. The array of claim 11 , wherein at least two of the first light modulating means, the second light modulating means, and the third light modulating means are located on separate layers.
14. The array of claim 11 , wherein the colors correspond to primary colors.
15. The array of claim 11 , wherein at least one of the first dimension, the second dimension, and the third dimension comprises a height.