Method of manufacturing magnetic head slider

1. A method of manufacturing a magnetic head slider, comprising the steps of:

forming, a read head and a process detection pattern for read, and a write head and a process detection pattern for write, on a wafer;

cutting the wafer into row bars each including a plurality of head elements contiguous to each other;

pressing the row bar against a rotating lapping surface table, swinging the row bar in a radial direction of the lapping surface table and lapping an air bearing surface while monitoring the process detection patterns for read and write, in which if the air-bearing surface is lapped with the row bar tilted in the longitudinal direction of a slider to compensate element height-wise positional deviations of the read head and the write head, the lapping is performed while changing an inclination angle stepwise and swinging the row bar in the longitudinal direction of the slider centering around an inclination angle at each step;

forming a protection film on the air-bearing surface after lapping the row bar; and

cutting the row bar into separated individual magnetic head sliders, wherein in the step of lapping the air-bearing surface of the row bar, when the row bar is lapped while being swung in the longitudinal direction of the slider, a head element forming portion side and a leading end side of the row bar are lapped alternately.

2. The method according to claim 1 , wherein in the step of lapping the air-bearing surface of the row bar, a width of swinging the row bar in the longitudinal direction of the slider is gradually attenuated.

3. The method according to claim 1 , wherein, if the element height-wise positional deviations of the read head and the write head are such that when an element height of the write head reaches a designed dimension through the lapping, an element height of the write head deviates in a shorter direction, the row bar is tilted so that a leading end side comes close to the lapping surface table.

4. The method according to claim 1 , wherein element height-wise positional deviations of the read head and the write head are detected by monitoring the process detection patterns for read and write, and to compensate the positional deviations, an inclination angle of the row bar in the longitudinal direction of the slider is changed stepwise.

5. The method according to claim 1 , wherein in the process of lapping the air-bearing surface of the row bar, offset loads are further applied to the rear surface of the row bar.

6. A method of manufacturing a magnetic head slider, comprising the steps of:

forming, a read head and a process detection pattern for read, and a write head and a process detection pattern for write, on a wafer;

cutting the wafer into row bars each including a plurality of head elements contiguous to each other;

pressing the row bar against a rotating lapping surface table, swinging the row bar in a radial direction of the lapping surface table and lapping an air bearing surface while monitoring the process detection patterns for read and write, in which if the air-bearing surface is lapped with the row bar tilted in the longitudinal direction of a slider to compensate element height-wise positional deviations of the read head and the write head, the lapping is performed while changing an inclination angle stepwise and swinging the row bar in the longitudinal direction of the slider centering around an inclination angle at each step;

forming a protection film on the air-bearing surface after lapping the row bar; and

cutting the row bar into separated individual magnetic head sliders, wherein the process detection pattern for write is formed in the same layer as a main magnetic pole piece constituting the write head and includes a detection pattern used to monitor a throat height of the main magnetic pole piece and a detection pattern used to adjust the inclination angle of the row bar.

7. The method according to claim 6 , wherein in the step of lapping the air-bearing surface of the row bar, a width of swinging the row bar in the longitudinal direction of the slider is gradually attenuated.

8. The method according to claim 6 , wherein, if the element height-wise positional deviations of the read head and the write head are such that when an element height of the write head reaches a designed dimension through the lapping, an element height of the write head deviates in a shorter direction, the row bar is tilted so that a leading end side comes close to the lapping surface table.

9. The method according to claim 6 , wherein element height-wise positional deviations of the read head and the write head are detected by monitoring the process detection patterns for read and write, and to compensate the positional deviations, an inclination angle of the row bar in the longitudinal direction of the slider is changed stepwise.

10. The method according to claim 6 , wherein in the process of lapping the air-bearing surface of the row bar, offset loads are further applied to the rear surface of the row bar.

11. A method of manufacturing a magnetic head slider, comprising the steps of:

forming, a read head and a process detection pattern for read, and a write head and a process detection pattern for write, on a wafer;

cutting the wafer into row bars each including a plurality of head elements contiguous to each other;

pressing the row bar against a rotating lapping surface table, swinging the row bar in a radial direction of the lapping surface table and lapping an air bearing surface while monitoring the process detection patterns for read and write, in which if the air-bearing surface is lapped with the row bar tilted in the longitudinal direction of a slider to compensate element height-wise positional deviations of the read head and the write head, the lapping is performed while changing an inclination angle stepwise and swinging the row bar in the longitudinal direction of the slider centering around an inclination angle at each step;

forming a protection film on the air-bearing surface after lapping the row bar; and

cutting the row bar into separated individual magnetic head sliders, wherein the process detection pattern for read is formed in the same layer as a read element of the read head and includes a detection pattern used to monitor a sensor height of the read element and a detection pattern used to adjust the inclination angle of the row bar.

12. The method according to claim 11 , wherein in the step of lapping the air-bearing surface of the row bar, a width of swinging the row bar in the longitudinal direction of the slider is gradually attenuated.

13. The method according to claim 11 , wherein, if the element height-wise positional deviations of the read head and the write head are such that when an element height of the write head reaches a designed dimension through the lapping, an element height of the write head deviates in a shorter direction, the row bar is tilted so that a leading end side comes close to the lapping surface table.

14. The method according to claim 11 , wherein element height-wise positional deviations of the read head and the write head are detected by monitoring the process detection patterns for read and write, and to compensate the positional deviations, an inclination angle of the row bar in the longitudinal direction of the slider is changed stepwise.

15. The method according to claim 11 , wherein in the process of lapping the air-bearing surface of the row bar, offset loads are further applied to the rear surface of the row bar.