Multiple cavity etched-facet DFB lasers
View Patent ↗A semiconductor chip has at least two DFB etched facet laser cavities with one set of facets with AR coatings and a second set of etched facets with HR coatings that have a different relative position with respect to the gratings. This creates a difference in the phase between each of the etched facets and the gratings which changes the operational characteristics of the two laser cavities such that at least one of the lasers provides acceptable performance. As a result, the two cavity arrangement greatly improves the yield of the fabricated chips.
1. A semiconductor chip, comprising:
a substrate;
an epitaxial laser structure on said substrate, said epitaxial laser structure including a grating layer;
a periodic grating formed in said grating layer;
at least first and second independent distributed feedback laser cavities formed in said epitaxial structure, said first and second laser cavities being spaced apart from one another in said epitaxial structure;
said first distributed feedback laser cavity having a first etched facet defining a first end of said first distributed feedback laser cavity and forming a first phase with said grating; and
said second distributed feedback laser cavity having a first etched facet defining a first end of said second distributed feedback laser cavity and forming a second phase with said grating, said second phase being different than the first phase,
whereby the likelihood of at least one of said first and second laser cavities being operational is increased.
2. The semiconductor chip of claim 1 , wherein said first etched facets are high-reflection coated.
3. The semiconductor chip of claim 1 , wherein said first and second laser cavities each has a second facet formed through etching.
4. The semiconductor chip of claim 3 , wherein the second facet of each of said first and second laser cavities is etched at an angle of about 45 degrees to said substrate.
5. The semiconductor chip of claim 4 , wherein a surface above said second facet of each of said first and second laser cavities is anti-reflection coated.
6. The semiconductor chip of claim 4 , wherein said epitaxial laser structure further comprises a semiconductor contact layer and said semiconductor contact layer is removed from above said second facet of each of said first and second laser cavities.
7. The semiconductor chip of claim 6 , wherein said semiconductor contact layer is formed of InGaAs.
8. The semiconductor chip of claim 6 , wherein a surface above said second facet of each of said first and second laser cavities is anti-reflection coated.
9. The semiconductor chip of claim 3 , wherein said second etched facet of each of said first and second laser cavities are perpendicular to said substrate.
10. The semiconductor chip of claim 3 , wherein said second facet of each of said first and second laser cavities are anti-reflection coated.
11. The semiconductor chip of claim 1 , wherein said chip is incorporated in a package and wherein at least one of said first and second laser cavities receives electrical current though a wirebond.
12. The semiconductor chip of claim 11 , wherein a lens in said package is aligned with said at least one laser cavity receiving electrical current through a wirebond.
13. The semiconductor chip of claim 1 , wherein said first and second laser cavities each has one cleaved facet.
14. The semiconductor chip of claim 13 , wherein said cleaved facets are anti-reflection coated.
15. The semiconductor chip of claim 14 , wherein said first etched facets are high-reflection coated.
16. The semiconductor chip of claim 1 , wherein said first and second laser cavities each has a length; and the length of said first laser cavity is different from the length of said second laser cavity.
17. A semiconductor chip, comprising:
a substrate;
an epitaxial laser structure on said substrate;
said epitaxial laser structure having a grating layer with a periodic grating of pitch Λ formed therein;
at least first and second independent distributed feedback laser cavities formed in said epitaxial structure, said first and second laser cavities spaced apart from one another in said epitaxial structure;
said first distributed feedback laser cavity having a first length and a first etched facet defining a first end of said first distributed feedback laser cavity that forms a first phase with said grating; and
said second distributed feedback laser cavity having a second length and a first etched facet defining a first end of said first distributed feedback laser cavity that forms a second phase with said grating;
wherein said first and second lengths are different from one another and said first and second phases are different from one another.
18. The semiconductor chip of claim 17 , wherein said first and said second lengths differ from one another by less than Λ and greater than zero.
19. The semiconductor chip of claim 18 , wherein said first and said second lengths differ from one another by less than 3Λ/4 and greater than or equal to Λ/4.
20. The semiconductor chip of claim 17 , wherein said chip is incorporated in a package and wherein at least one of said first and second laser cavities receives electrical current though a wirebond.
21. The semiconductor chip of claim 20 , wherein a lens in said package is aligned with said at least one laser cavity receiving electrical current through a wirebond.