Semiconductor integrated circuit device and a method of manufacturing the same
The memory cell transistor includes, in a first well region, a pair of memory electrodes, one of which serves as source electrode and the other serves as drain electrode and a channel region interposed between the pair of memory electrodes. There is, on a channel region, a first gate electrode disposed near its corresponding memory electrode with an insulating film interposed therebetween, and a second gate electrode disposed through insulating films and a charge storage region and electrically isolated from the first gate electrode. A first negative voltage is applied to the first well region to form a state of reverse bias greater than or equal to a junction withstand voltage between the second gate electrode and the memory electrode near the second gate electrode, thereby enabling injection of hot electrons into the charge storage region and injection of electrons from the well region to the charge storage region.
1. A semiconductor integrated circuit device comprising a nonvolatile memory cell transistor formed in a semiconductor substrate,
wherein the nonvolatile memory cell transistor includes:
a first insulating film formed over the semiconductor substrate;
a first gate electrode formed over the first insulating film;
a second insulating film including a charge storage film and formed over the semiconductor substrate and over one side surface of the first gate electrode; and
a second gate electrode formed over the second insulating film and over the one side surface of the first electrode through the second insulating film, and
wherein the height from the semiconductor substrate to a top surface of the second gate electrode is higher than the height from the semiconductor substrate to a top surface of the first gate electrode.
2. A semiconductor integrated circuit device according to claim 1 , wherein a silicide layer is formed over the second gate electrode.
3. A semiconductor integrated circuit device according to claim 2 , wherein the suicide layer is formed of a cobalt silicide or a nickel silicide.
4. A semiconductor integrated circuit device according to claim 1 , wherein silicide layers are formed over the first and second gate electrodes, respectively.
5. A semiconductor integrated circuit device according to claim 4 , wherein the silicide layers are formed of a cobalt silicide or a nickel silicide.
6. A semiconductor integrated circuit device according to claim 1 , wherein the charge storage film is formed of a silicon nitride film.
7. A semiconductor integrated circuit device according to claim 1 , wherein the second gate electrode has a side spacer-like shape.
8. A semiconductor integrated circuit device according to claim 1 , wherein writing or erasure operations of the nonvolatile memory cell transistor are performed by injecting electrons or hot-holes into the charge storage film.
9. A semiconductor integrated circuit device comprising a nonvolatile memory cell transistor formed in a semiconductor substrate,
wherein the nonvolatile memory cell transistor includes:
a first insulating film formed over the semiconductor substrate;
a first gate electrode formed over the first insulating film;
a second insulating film including a silicon nitride film as a charge storage film and formed over the semiconductor substrate and over one side surface of the first gate electrode; and
a second gate electrode formed over the second insulating film and over the one side surface of the first electrode through the second insulating film,
wherein the second gate electrode has a side spacer-like shape, and
wherein the height from the semiconductor substrate to a top surface of the second gate electrode is higher than the height from the semiconductor substrate to a top surface of the first gate electrode.
10. A semiconductor integrated circuit device according to claim 9 , wherein a silicide layer is formed over the second gate electrode.
11. A semiconductor integrated circuit device according to claim 10 , wherein the suicide layer is formed of a cobalt suicide or a nickel suicide.
12. A semiconductor integrated circuit device according to claim 9 , wherein silicide layers are formed over the first and second gate electrodes, respectively.
13. A semiconductor integrated circuit device according to claim 12 , wherein the silicide layers are formed of a cobalt suicide or a nickel silicide.
14. A semiconductor integrated circuit device according to claim 9 , wherein writing or erasure operations of the nonvolatile memory cell transistor are performed by injecting electrons or hot-holes into the charge storage film.