Ohmic contact on p-type GaN
View Patent ↗An ohmic contact in accordance with the invention includes a layer of p-type GaN-based material. A first layer of a group II-VI compound semiconductor is located adjacent to the layer of p-type GaN-based material. The ohmic contact further includes a metal layer that provides metal contact. A second layer of a different II-VI compound semiconductor is located adjacent to the metal layer.
1. An ohmic contact comprising:
a layer of p-type GaN-based material;
a layer of metal configured to provide a metal contact;
a first layer of p-type group II-VI compound semiconductor material comprising a first group VI element, the first layer located adjacent to the layer of p-type GaN-based material; and
a second layer of p-type group II-VI compound semiconductor material comprising a second group VI element different than the first group VI element, the second layer located adjacent to the layer of metal.
2. The ohmic contact of claim 1 , further comprising:
a graded bandgap region of p-type group II-VI compound semiconductor material sandwiched between the first layer and the second layer, wherein the graded bandgap region of material comprises the first group VI element and the second group VI element.
3. The ohmic contact of claim 2 , wherein:
the p-type GaN-based material is In x Al y Ga 1-x-y N;
the first layer comprises material having a general formula XY wherein X is an element selected from group II and Y is the first group VI element;
the second layer comprises material having a general formula XZ wherein X is the element selected from group II and Z is the second group VI element; and
the graded bandgap region of material has a general formula XY n Z 1-n wherein X is an element selected from group II, Y is the first group VI element, and Z is the second group VI element.
4. The ohmic contact of claim 3 , wherein the graded bandgap region contains one of a) a linearly graded region of semiconductor material and b) a non-linearly graded region of semiconductor material.
5. The ohmic contact of claim 3 , wherein a first valence band offset between the second layer and the layer of metal is less than a second valence band offset between the layer of p-type GaN-based material and the layer of metal.
6. The ohmic contact of claim 5 , wherein the first layer comprises a first one of a) ZnTe, b) ZnSe, and c) ZnO; and wherein the second layer comprises a second one of a) ZnTe, b) ZnSe, and c) ZnO, the first one being different than the second one.