Method and apparatus for peeling electronic component

1. A method of peeling an electronic component, comprising:

bringing a bellowphragm into contact with a second main surface, which is a main surface of a tape member, when the electronic component is adhered onto a first main surface of the tape member, the first main surface is another main surface of the tape member; and

after the bellowphragm is brought into contact with the second main surface, deforming the bellowphragm and the tape member by supplying a fluid to the bellowphragm, so as to perform peeling the electronic component from the tape member while the electronic component is being vacuumed and held by a vacuum device; and

detecting a rate of rise per unit time in pressure inside the bellowphragm by a gauge to measure a contact force by which the electronic component contacts the vacuum device.

2. The method of peeling the electronic component according to claim 1 , wherein in the peeling the electronic component from the tape member, the electronic component is raised through deformation of the bellowphragm and the tape member.

3. The method of peeling the electronic component according to claim 1 , further comprising:

arranging the vacuum device above the bellowphragm so that a distance between the vacuum device and the electronic component becomes a predetermined distance;

pressurizing the inside of the bellowphragm so that a pressure inside the bellowphragm becomes a predetermined pressure; and

initiating vacuuming of the electronic component by the vacuum device after the electronic component contacts the vacuum device.

4. The method of peeling the electronic component according to claim 3 , wherein the predetermined distance between a lower surface of the vacuum portion of the vacuum device and an upper surface of the electronic component and the predetermined pressure inside the bellowphragm are determined on the basis of a characteristic of the tape member.

5. The method of peeling the electronic component according to claim 1 , wherein the measuring the vacuumed state between the vacuum device and the electronic component includes: obtaining a vacuum pressure generated by the vacuum device and the contact force by which the electronic component contacts the vacuum device; and controlling a pressure inside the bellowphragm and a position of the vacuum device on the basis of the vacuum pressure and the contact force.

6. The method of peeling the electronic component according to claim 5 , wherein when the contact force by which the electronic component contacts the vacuum device exceeds a predetermined value and it is detected that an inside of the vacuum device is not in a vacuum state, it is determined that an abnormal state is occurring.

7. The method of peeling the electronic component according to claim 5 , wherein when a timing at which the electronic component contacts a lower surface of the vacuum device and a timing at which the electronic component is vacuumed to the lower surface of the vacuum device are earlier than a predetermined timing, it is determined that an abnormal state is occurring.

8. The method of peeling the electronic component according to claim 5 , wherein a timing at which the electronic component is vacuumed to a lower surface of the vacuum device is later than a predetermined timing, it is determined that an abnormal state is occurring.

9. The method of peeling the electronic component according to claim 1 , wherein the bellowphragm includes a plurality of bellowphragm components, and wherein each of the bellowphragm components is activated in accordance with a state in which the electronic component is peeled from the tape member.

10. The method of peeling the electronic component according to claim 5 , wherein the detecting the vacuum pressure generated by the vacuum device is performed by a differential pressure detector and the detecting the contact force by which the electronic component contacts the vacuum device is performed by the gauge that is arranged between a lower surface of the vacuum device and a support of the vacuum device.