Semiconductor device, and manufacturing method therefor
View Patent ↗To provide a semiconductor device with improved reliability. The semiconductor device includes a wiring board, a microcomputer chip flip-chip bonded over the wiring board via gold bumps, a first memory chip laminated over the microcomputer chip, wires for coupling the first memory chip to the wiring board, an underfill material with which a flip-chip coupling portion of the microcomputer chip is filled, and a sealing member for sealing the microcomputer chip and the first memory chip with resin. Further, the corner of a second opening portion of a solder resist film of the wiring board corresponding to the corner of the chip on the air vent side in charging the underfill material is made close to the microcomputer chip, which can improve the wettability and spread of the underfill material at the second opening portion, thus reducing the exposure of leads to the second opening portion, thereby improving the reliability of the semiconductor device.
1. A manufacturing method for a semiconductor device, comprising the steps of:
(a) preparing a substrate including a plurality of bonding leads, and having an insulating film formed over a surface thereof, the bonding leads being exposed to an opening of the insulating film;
(b) mounting a semiconductor chip having a rectangular planar shape, and including a main surface with a plurality of pads formed thereover, and a back surface opposite to the main surface, over the bonding leads of the substrate via protruding electrodes formed over the pads such that the main surface is opposed to the surface of the substrate;
(c) filling a gap between the substrate and the semiconductor chip with underfill material; and
(d) providing a plurality of external terminals at the back surface of the substrate for being coupled to an external portion,
wherein the opening of the insulating film of the substrate is formed along an outer peripheral shape of the semiconductor chip, and includes a first opening portion corresponding to a corner of the semiconductor chip, and a second opening portion opposed to the first opening portion,
wherein a plurality of through holes to be coupled to the external terminals are arranged outside the opening,
wherein the bonding lead includes a lead wire derived from the through hole into the opening, and a mounting portion over which the protruding electrode is mounted,
wherein the bonding lead derived in a direction from an outside of a side of the substrate into the opening, and the bonding lead derived in a direction from a center of the semiconductor chip into the opening are alternately arranged in the opening,
wherein the opening of the substrate is formed in a rectangular shape having a planar shape with four corners,
wherein the first opening portion has a first corner of the four corners, and the second opening portion has a second corner thereof, and
wherein a distance between the second corner and a corner of the semiconductor chip adjacent thereto is shorter than that between the first corner and a corner of the semiconductor chip adjacent thereto, and
wherein in the step (c), the underfill material is dropped from the first opening, so that the gap between the substrate and the semiconductor chip is filled with the underfill material.
2. The manufacturing method for the semiconductor device according to claim 1 ,
wherein the opening has a first side and a second side, and
wherein the second corner is an intersection point of a third side positioned between the first side and an outer periphery of the chip and leading to the first side, and a fourth side positioned between the second side and an outer periphery of the chip and leading to the second side.
3. The manufacturing method for the semiconductor device according to claim 2 ,
wherein the second corner is positioned along a diagonal line connecting a center of the semiconductor chip and the corresponding corner of the semiconductor chip.
4. The manufacturing method for the semiconductor device according to claim 1 , wherein in the step (c), the underfill material is dropped from the first opening portion, while moving the nozzle along the side of the semiconductor chip, and the dropping of the underfill material is stopped before the underfill material reaches the corner of the same side of the semiconductor chip.
5. The manufacturing method for the semiconductor device according to claim 1 , wherein the first opening portion is formed more widely than any other portion in the opening of the insulating film formed along the outer peripheral shape of the semiconductor chip.
6. The manufacturing method for the semiconductor device according to claim 1 , wherein dummy leads not coupled to the through hole are provided at both ends of a bonding lead line of the substrate corresponding to one side of the semiconductor chip.
7. The manufacturing method for the semiconductor device according to claim 1 , wherein a plurality of target marks for identification are formed in the opening of the insulating film of the substrate.
8. The manufacturing method for the semiconductor device according to claim 1 , wherein a plurality of target marks for identification are formed outside the opening of the insulating film of the substrate.
9. The manufacturing method for the semiconductor device according to claim 8 , wherein a distance between the first corner of the substrate and a corner of the semiconductor chip adjacent thereto is longer than that between each of three other corners of the substrate and the corner of the semiconductor chip adjacent thereto.