Microcap acoustic transducer device
View Patent ↗A device includes a first wafer, a second wafer, a gasket bonding the first wafer to the second wafer to define a cavity between the first wafer and the second wafer, and an acoustic transducer disposed on the first wafer and disposed within the cavity between the first wafer and the second wafer. One or more apertures are provided for communicating an acoustic signal between the acoustic transducer and an exterior of the device. An aperture may be formed in the cavity itself, or the cavity may be hermetically sealed. An aperture may be formed completely through the first wafer and located directly beneath at least a portion of the acoustic transducer.
1. A device, comprising:
a first wafer;
a second wafer;
a gasket bonding the first wafer to the second wafer to define a cavity between the first wafer and the second wafer, wherein the first and second wafers are semiconductor wafers; and
a thin film acoustic transducer disposed on the first wafer and disposed within the cavity between the first wafer and the second wafer,
wherein the first wafer includes an aperture formed completely therethrough for communicating an acoustic signal between the thin film acoustic transducer and an exterior of the device, said aperture being located directly beneath at least a portion of the thin film acoustic transducer.
2. The device of claim 1 , wherein the gasket hermetically seals the cavity between the first wafer and the second wafer.
3. The device of claim 1 , wherein the gasket includes at least one opening for communicating the acoustic signal between the acoustic transducer and the exterior of the device.
4. The device of claim 3 , wherein the gasket further includes a blocking portion disposed in a straight line between the opening in the gasket and the acoustic transducer.
5. The device of claim 1 , further comprising a second acoustic transducer disposed on the second wafer and disposed within the cavity between the first wafer and the second wafer, wherein the second wafer includes an aperture formed completely therethrough for communicating an acoustic signal between the second acoustic transducer and the exterior of the device, said aperture being located directly beneath at least a portion of the second acoustic transducer.
6. The device of claim 1 , further comprising a via provided through one of the first and second wafers for making an electrical connection to the transducer or another element disposed within the cavity between the first wafer and the second wafer.
7. The device of claim 1 , further comprising a transducer circuit element comprising at least one of a transducer driver and a signal receiver, wherein the transducer circuit element is disposed on the second wafer.
8. The device of claim 1 , further comprising one or more additional acoustic transducers disposed on the first wafer and disposed within the cavity between the first wafer and the second wafer, wherein the first wafer includes a one or more additional apertures formed completely therethrough for communicating one or more additional acoustic signals between the one or more additional acoustic transducers and the exterior of the device, each said aperture being located directly beneath at least a portion of a corresponding one of the one or more additional acoustic transducers.
9. The device of claim 1 , wherein at least a portion of an interior surface of the cavity is provided with an acoustically-reflecting material.
10. The device of claim 1 , wherein at least a portion of an interior surface of the cavity is provided with an acoustically-absorbing material.
11. The device of claim 1 , wherein at least one of the first and second wafers includes an additional aperture therethrough for communicating the acoustic signal between the acoustic transducer and the exterior of the device.
12. The device of claim 11 , further comprising at least one acoustic reflector provided within the cavity for directing the acoustic signal between the acoustic transformer and the additional aperture.
13. The device of claim 1 , wherein the cavity includes a plurality of additional apertures therethrough for communicating the acoustic signal between the acoustic transducer and the exterior of the device, each of said apertures being no more than 10% of a size of the aperture disposed beneath the acoustic transducer.
14. A device, comprising:
a first wafer;
a second wafer;
a gasket bonding the first wafer to the second wafer to define a cavity between the first wafer and the second wafer;
an acoustic transducer disposed on the first wafer and disposed within the cavity between the first wafer and the second wafer, wherein the cavity includes an aperture for communicating an acoustic signal between the acoustic transducer and an exterior of the device; and
a transducer circuit element comprising at least one of a transducer driver and a signal receiver, wherein the transducer circuit element is disposed on the second wafer.
15. The device claim 14 , wherein the gasket includes the aperture.
16. The device of claim 15 , wherein the gasket further includes a blocking portion disposed in a straight line between the aperture in the gasket and the acoustic transducer.
17. The device of claim 14 , wherein one of the first and second wafers includes the aperture.