Ferroelectric memory device and fabrication process thereof, fabrication process of a semiconductor device
A ferroelectric memory device includes a field effect transistor formed on a semiconductor substrate, an interlayer insulation film formed on the semiconductor substrate so as to cover the field effect transistor, a conductive plug formed in the interlayer insulation film in contact with the first diffusion region, and a ferroelectric capacitor formed over the interlayer insulation in contact with the conductive plug, wherein the ferroelectric capacitor includes a ferroelectric film and upper and lower electrodes sandwiching the ferroelectric film respectively from above and below, the lower electrode being connected electrically to the conductive plug, a layer containing oxygen being interposed between the conductive plug and the lower electrode, a layer containing nitrogen being interposed between the layer containing oxygen and the lower electrode, a self-aligned layer being interposed between the layer containing nitrogen and the lower electrode.
1. A method of fabricating a ferroelectric memory apparatus, comprising:
forming an interlayer insulation film so as to cover a transistor which is formed on a semiconductor substrate;
forming a conductive plug in said interlayer insulation film in contact with a diffusion region of said transistor; and
forming a ferroelectric capacitor over said conductive plug by consecutively stacking a lower electrode, a ferroelectric film and an upper electrode,
wherein there is provided, after said process of forming said conductive plug but before said process of forming said lower electrode, the process of: forming a layer containing oxygen on said interlayer insulation film and a surface of said conductive plug; forming a layer containing nitrogen on a surface of said layer containing oxygen including a part of said layer containing oxygen on said conductive plug; and forming a self-alignment film on said layer containing nitrogen,
said process of forming said layer containing oxygen comprises the process of depositing a layer containing Si on said surface of said contact plug; and reacting oxygen radicals to said layer containing Si.
2. The method as claimed in claim 1 , wherein said process of forming said layer containing oxygen comprises the process of: supplying a Si compound into a processing space containing said interlayer insulation film and said surface of said contact plug, such that said Si compound is adsorbed to said surface; removing said Si compound remaining in said processing space; supplying an oxidizing agent to said processing space and reacting oxygen atoms with said Si compound absorbed to said surface; and removing said oxidizing agent remaining in said processing space.
3. The method of fabricating a ferroelectric memory device as claimed in claim 1 , wherein said process of forming said layer containing oxygen comprises the process of reacting oxygen radicals to said surface of said contact plug.
4. The method as claimed in claim 1 , wherein said process of forming said layer containing nitrogen comprises the process of reacting NH radicals to a surface of said layer containing oxygen.
5. The method as claimed in claim 1 , wherein said process of forming said layer containing nitrogen comprises the process of reacting nitrogen radicals and hydrogen radicals to a surface of said layer containing oxygen.
6. The method as claimed in claim 1 , wherein said process of forming said self-alignment film is conducted at a temperature of 300° C. or less.
7. The method as claimed in claim 1 , wherein said process of forming said self-alignment film comprises the process of depositing a Ti film.
8. A method of fabricating a semiconductor device having a functional film, comprising:
forming an interlayer insulation film so as to cover a transistor which is formed on a semiconductor substrate;
forming a conductive plug in said interlayer insulation film in contact with a diffusion region of said transistor; and
forming a functional film over said conductive plug,
wherein there is provided, after said process of forming said conductive plug but before process step of forming said functional film, the process of: forming a layer containing oxygen on said interlayer insulation film and a surface of said conductive plug; forming a layer containing nitrogen on a surface of said layer containing oxygen including a part of said layer containing oxygen on said conductive plug; and forming a self-alignment film on said layer containing nitrogen,
said process of forming said layer containing oxygen comprises the process of depositing a layer containing Si on said surface of said contact plug; and reacting oxygen radicals to said layer containing Si.
9. The method as claimed in claim 8 , wherein said functional film comprises a Ti film.
10. The method as claimed in claim 9 , wherein said Ti film has a (002) orientation.
11. The method as claimed in claim 8 , wherein said functional film consists of one of an Ir film, a Pt film, a PZT film, a SrRuO3 film, a Ru film, a TiN film, a TiAlN film, a Cu film and IrOx film.