Method for repairing display device and apparatus for same
An object of the present invention is to provide a method for repairing a display device according to which a wide variety of regions can be repaired in various ways using various materials, as well as an apparatus for the same. The present invention provides a repairing apparatus for repairing a pattern defect on a surface of a substrate in a display device where an electronic circuit pattern having the above described pattern defect is formed, characterized by having a plasma irradiation means for repairing the above described pattern defect through local irradiation of a region including the above described pattern defect with plasma.
1. An apparatus for repairing a display device having a pattern defect on a surface of a substrate where an electronic circuit pattern having said pattern defect is formed, comprising:
a first gas supplying portion for supplying a first gas;
a tubule configured to have a plasma generated within the tubule from the first gas and for jetting the plasma toward the surface of the substrate from the tubule;
a second gas supplying portion for supplying a second gas comprising a material gas for forming a thin film or an etching gas toward the surface of the substrate from an opening of the second gas supplying portion, wherein the second gas supplying portion is provided separately from and outside of the tubule;
an observation mechanism including a camera which compares a normal pixel and a defective pixel, recognizes a location and a size of the defect of the pattern defect and categorizes the type of the defect; and
a mask for making the plasma jet finely pointed, wherein said mask is provided between said tubule and the substrate, the second gas supplying portion is provided between said mask and the substrate, and a plurality of through holes of different dimensions are formed on the mask.
2. The apparatus for repairing a display device according to claim 1 , further comprising:
an open portion, wherein one end of said tubule is inserted into a plasma reaction portion from a side opposite to said open portion;
an electrode provided around the outer peripheral region of the tubule for generating the plasma from the first gas and supplying high-frequency power from a high-frequency power supply via a matching network: and
a stage mechanism which can hold said display device and is movable provided in said open portion;
wherein the observation mechanism receives information on the pattern defect from an inspection apparatus prior to detecting and categorizing the pattern defect.
3. The apparatus for repairing a display device according to claim 2 , characterized in that a reactive gas supplied from the second gas supplying portion decomposes in accordance with the physical amount of the gas supplied from said first gas supplying portion.
4. The apparatus for repairing a display device according to claim 3 , characterized in that said physical amount of the gas is at least a flow amount, a flow rate, a type of gas, or an ionization degree.
5. The apparatus for repairing a display device according to claim 1 , characterized in that said mask is an insulator.
6. The apparatus for repairing a display device according to claim 1 , a control portion configured to control a temperature of an article to be processed in accordance with the physical amount of the gas supplied from said first gas supplying portion.
7. The apparatus for repairing a display device according to claim 6 , characterized in that said physical amount of the gas is at least a flow amount, a flow rate, a type of gas, or an ionization degree.