Manufacturing method of semiconductor device
An aluminum oxide film covering a ferroelectric capacitor is formed. Next, an opening ( 51 t ) where a portion of a top electrode is exposed and an opening ( 51 b ) where a portion of a bottom electrode is exposed are formed in the aluminum oxide film. Thereafter, films ( 23 to 26 ) are formed and a resist pattern ( 92 ) is formed. Then, etching of the films ( 23 to 26 ) is performed with using the resist pattern ( 92 ) as a mask thereby forming contact holes ( 27 t ) and ( 27 b ). At this time, since the openings ( 51 t ) and ( 51 b ) are formed in the aluminum oxide film, the aluminum oxide film is not required to be processed. Consequently, the contact holes ( 27 t ) and ( 27 b ) can be formed easily.
1. A manufacturing method of a semiconductor device comprising:
forming a ferroelectric capacitor above a semiconductor substrate;
forming a first hydrogen barrier film directly on the ferroelectric capacitor;
forming a first opening where a portion of an electrode of the ferroelectric capacitor is exposed in the first hydrogen barrier film;
after the forming the first opening, forming a first insulating film whose surface is flat on the first hydrogen barrier film;
forming a second hydrogen barrier film directly on the first insulating film;
forming a second insulating film on the second hydrogen barrier film;
forming a first conductive plug in contact with the semiconductor substrate through the second insulating film, the second hydrogen barrier film, and the first insulting film;
forming an oxidation preventing film on the first conductive plug and the second insulating film; and
forming a second conductive plug in contact with the electrode of the ferroelectric capacitor through the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening,
wherein
the manufacturing method further comprises, before the forming the ferroelectric capacitor:
forming a third insulating film whose surface is flat above the semiconductor substrate;
forming a third conductive plug in contact with the semiconductor substrate in the third insulating film;
forming a fourth insulating film on the third insulating film and the third conductive plug; and
thinning a portion of the fourth insulating film in a region above the third conductive plug contemporaneously with the time period in which the first opening is formed, and
the ferroelectric capacitor is formed on the fourth insulating film.
2. The manufacturing method of a semiconductor device according to claim 1 , wherein the forming the second conductive plug comprises:
forming a second opening reaching the electrode in the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second opening and on the oxidation preventing film; and
polishing the conductive film until the second insulating film is exposed.
3. The manufacturing method of a semiconductor device according to claim 1 , wherein the forming the second conductive plug comprises:
forming a second opening reaching the electrode in the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second opening and on the oxidation preventing film;
polishing the conductive film until the oxidation preventing film is exposed; and
removing the oxidation preventing film.
4. The manufacturing method of a semiconductor device according to claim 1 , wherein a thickness of the second hydrogen barrier film is set to be equal to or more than 20 nm.
5. The manufacturing method of a semiconductor device according to claim 1 , wherein the forming the second conductive plug comprises:
forming a second opening reaching the electrode in the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second opening and on the oxidation preventing film; and
polishing the conductive film until the second insulating film is exposed.
6. The manufacturing method of a semiconductor device according to claim 1 , wherein the forming the second conductive plug comprises:
forming a second opening reaching the electrode in the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second opening and on the oxidation preventing film;
polishing the conductive film until the oxidation preventing film is exposed; and
removing the oxidation preventing film.
7. The manufacturing method of a semiconductor device according to claim 1 , wherein a thickness of the second hydrogen barrier film is set to be equal to or more than 20 nm.
8. The manufacturing method of a semiconductor device according to claim 1 , wherein the forming the second conductive plug comprises:
forming a second opening reaching the electrode in the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second opening and on the oxidation preventing film; and
polishing the conductive film until the second insulating film is exposed.
9. The manufacturing method of a semiconductor device according to claim 1 , wherein the forming the second conductive plug comprises:
forming a second opening reaching the electrode in the oxidation preventing film, the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second opening and on the oxidation preventing film;
polishing the conductive film until the oxidation preventing film is exposed; and
removing the oxidation preventing film.
10. The manufacturing method of a semiconductor device according to claim 1 , wherein a thickness of the second hydrogen barrier film is set to be equal to or more than 20 nm.
11. A manufacturing method of a semiconductor device comprising:
forming a third insulating film whose surface is flat above a semiconductor substrate;
forming a third conductive plug in contact with the semiconductor substrate in the third insulating film;
forming a fourth insulating film on the third insulating film and the third conductive plug;
forming a ferroelectric capacitor on the fourth insulating film;
forming a first hydrogen barrier film directly on the ferroelectric capacitor;
thinning a portion of the fourth insulating film in a region above the third conductive plug;
forming a first opening where a portion of an electrode of the ferroelectric capacitor is exposed in the first hydrogen barrier film;
after the forming the first opening, forming a first insulating film whose surface is flat on the first hydrogen barrier film;
forming a second hydrogen barrier film directly on the first insulating film;
forming a second insulating film on the second hydrogen barrier film; and
forming a first conductive plug in contact with the semiconductor substrate in the second insulating film, the second hydrogen barrier film, the first insulating film, and the fourth insulating film; and
forming a second conductive plug in contact with an electrode of the ferroelectric capacitor through the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening,
wherein
the forming the first and second conductive plugs comprises:
forming a second opening reaching the third conductive plug in the second insulating film, the second hydrogen barrier film, the first insulating film, the first hydrogen barrier film, and the fourth insulating film, and forming a third opening reaching the electrode in the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second and third openings and on the second insulating film; and
polishing the conductive film until the second insulating film is exposed, and
in the forming the second and third openings,
after the second opening reaches the fourth insulating film, recovery annealing of the ferroelectric capacitor is performed via the third opening, and
the second opening is next made to reach the third conductive plug.
12. The manufacturing method of a semiconductor device according to claim 11 , wherein a thickness of the second hydrogen barrier film is set to be equal to or more than 20 nm.
13. A manufacturing method of a semiconductor device comprising:
forming a third insulating film whose surface is flat above a semiconductor substrate;
forming a third conductive plug in contact with the semiconductor substrate in the third insulating film;
forming a fourth insulating film on the third insulating film and the third conductive plug;
forming a ferroelectric capacitor on the fourth insulating film;
forming a first hydrogen barrier film directly on the ferroelectric capacitor;
thinning a portion of the fourth insulating film in a region above the third conductive plug;
forming a first opening where a portion of an electrode of the ferroelectric capacitor is exposed in the first hydrogen barrier film;
after the forming the first opening, forming a first insulating film whose surface is flat on the first hydrogen barrier film;
forming a second hydrogen barrier film directly on the first insulating film;
forming a second insulating film on the second hydrogen barrier film; and
forming a first conductive plug in contact with the semiconductor substrate in the second insulating film, the second hydrogen barrier film, the first insulating film, and the fourth insulating film; and
forming a second conductive plug in contact with an electrode of the ferroelectric capacitor through the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening,
wherein
in thinning the portion of the fourth insulating film, at least a portion where the second conductive plug is formed of the first hydrogen barrier film is removed to form the first opening,
the forming the first and second conductive plugs comprises:
forming a second opening reaching the third conductive plug in the second insulating film, the second hydrogen barrier film, the first insulating film, the first hydrogen barrier film, and the fourth insulating film, and forming a third opening reaching the electrode in the second insulating film, the second hydrogen barrier film, the first insulating film, and the first opening;
forming a conductive film in the second and third openings and on the second insulating film; and
polishing the conductive film until the second insulating film is exposed, and
in the forming the second and third openings,
after the second opening reaches the fourth insulating film, recovery annealing of the ferroelectric capacitor is performed via the third opening, and
the second opening is next made to reach the third conductive plug.
14. The manufacturing method of a semiconductor device according to claim 13 , wherein a thickness of the second hydrogen barrier film is set to be equal to or more than 20 nm.