Liquid crystal display device and process of manufacture
View Patent ↗Provided is a liquid crystal display device capable of significantly reducing occurrence of a failure such as an interlayer short-circuit. In the liquid crystal device, a first layer formed of a copper film having a purity of 99.5% or more and a second layer formed of an alloy film containing copper as a main component are successively formed on a glass substrate or a substrate on which a transparent conductive film containing indium is formed. The alloy film serving as the second layer is made of an alloy containing copper as a main component, which has a higher etching rate in a wet etching process compared with that of copper. Accordingly, a patterned cross-section of the copper film having a large film thickness can be etched in a tapered shape, to thereby improve coverage of an insulating film or the like laminated on a wiring pattern.
1. A liquid crystal display device comprising a thin film transistor substrate which controls alignment of liquid crystal, wherein the thin film transistor substrate comprises, as a part of wiring thereof:
a first layer formed of a copper film made of pure copper having a purity of at least 99.5%; and
a second layer formed of an alloy film containing copper as a main component and an additive metal element and having a higher etching rate in a wet etching process compared with that of the first layer, the second layer being provided on the first layer.
2. A liquid crystal display device according to claim 1 , wherein the second layer formed of the alloy film containing copper as a main component contains, as the additive metal element, a metal element which forms a metal element oxide having a higher degree of etchant solubility compared with that of a copper oxide.
3. A liquid crystal display device according to claim 2 , wherein the second layer formed of the alloy film containing copper as a main component contains, as the additive metal element, at least one kind of elements selected from the group consisting of cerium, europium, hafnium, lutetium, manganese, magnesium, lead, terbium, thulium, and zinc.
4. A liquid crystal display device according to claim 3 , wherein the second layer formed of the alloy film containing copper as a main component has a higher corrosion resistance compared with that of pure copper forming the first layer.
5. A liquid crystal display device according to claim 2 , further comprising a transparent conductive film containing an indium oxide as a main component, the transparent conductive film being provided under the first layer,
wherein the second layer formed of the alloy film containing copper as a main component contains, as the additive metal element, at least one kind of elements selected from the group consisting of boron, bismuth, cerium, europium, germanium, hafnium, lutetium, manganese, magnesium, lead, silicon, terbium, thulium, vanadium, and zinc.
6. A liquid crystal display device according to claim 5 , wherein the second layer formed of the alloy film containing copper as a main component has a higher corrosion resistance compared with that of pure copper forming the first layer.
7. A liquid crystal display device according to claim 2 , wherein the second layer formed of the alloy film containing copper as a main component contains, as the additive metal element, at least one kind of elements selected from the group consisting of aluminum, boron, beryllium, bismuth, cerium, europium, gallium, germanium, hafnium, lutetium, manganese, magnesium, lead, silicon, terbium, thulium, vanadium, and zinc.
8. A liquid crystal display device according to claim 7 , wherein the second layer formed of the alloy film containing copper as a main component has a higher corrosion resistance compared with that of pure copper of the first layer.
9. A liquid crystal display device according to claim 1 , wherein the second layer has a film thickness within a range of 10 nm to a value equal to or less than 10% of a film thickness of the first layer.
10. A method of manufacturing a liquid crystal display device comprising a thin film transistor substrate which controls alignment of liquid crystal, the method comprising:
forming a first layer formed of a copper film having a purity of at least 99.5% and a second layer formed of an alloy film containing copper as a main component in a successive manner to form a laminated film, for forming a scanning signal line and a gate electrode;
forming a film made of silicon nitride which serves as a gate insulating film, and forming a semiconductor layer by forming an amorphous silicon film and an n + -amorphous silicon film in a successive manner;
forming an image signal line, a drain electrode, and a source electrode, which are each formed of a metal film;
forming a film made of silicon nitride serving as a protective insulating film, and opening a through hole in the protective insulating film and in the gate insulating film; and
forming a transparent conductive film to complete a pixel electrode,
wherein the laminated film of the first layer and the second layer is subjected to etching with an etchant having a pH in a range smaller than 7.0.
11. A method of manufacturing a in-plane-switching system liquid crystal display device comprising a thin film transistor substrate which controls alignment of liquid crystal, the method comprising:
forming a transparent conductive film containing an indium oxide as a main component, a first layer formed of a copper film having a purity of at least 99.5%, and a second layer formed of an alloy film containing copper as a main component in a successive manner to form a laminated film, for forming a scanning signal line, a gate electrode, a common signal line, and a common electrode;
forming a film made of silicon nitride serving as a gate insulating film, and forming a semiconductor layer by forming an amorphous silicon film and an n + -amorphous silicon film in a successive manner;
forming a metal film for forming an image signal line, a drain electrode, and a source electrode;
forming a film made of silicon nitride serving as a protective insulating film, and opening a through hole in the protective insulating film and in the gate insulating film; and
forming the transparent conductive film to complete a pixel electrode,
wherein the common electrode is a base of the first layer; and
the first layer and the second layer are subjected to etching with an etchant having a pH within a range of 1.8 to 7.0.
12. A method of manufacturing a liquid crystal display device comprising a thin film transistor substrate which controls alignment of liquid crystal, the method comprising:
forming a first layer formed of a copper film having a purity of at least 99.5% and a second layer formed of an alloy film containing copper as a main component in a successive manner to form a laminated film, for forming a scanning signal line and a gate electrode;
forming a film made of silicon nitride which serves as a gate insulating film, and forming a semiconductor layer by forming an amorphous silicon film and an n + -amorphous silicon film in a successive manner;
forming a metal film for forming an image signal line, a drain electrode, and a source electrode;
forming a film made of silicon nitride which serves as a protective insulating film, and opening a through hole in the protective insulating film and in the gate insulating film; and
forming a transparent conductive film to complete a pixel electrode,
wherein the laminated film of the first layer and the second layer is subjected to etching with an etchant having a pH within a range of 7.0 to 14.0.