Semiconductor device and method of manufacturing the same
View Patent ↗Provided is a semiconductor device, including a silicon substrate, a first insulating film formed on the silicon substrate, a first conductive plug formed in an inside of a first contact hole of the first insulating film, an underlying conductive film having a flat surface formed on the first conductive plug and in the circumference thereof, a crystalline conductive film formed on the underlying conductive film, and a capacitor in which a lower electrode, a dielectric film made of a ferroelectric material, and an upper electrode are laminated in this order on the crystalline conductive film.
1. A method of manufacturing a semiconductor device, comprising the steps of:
forming an impurity diffusion region in a surface layer of a semiconductor substrate;
forming an insulating film on the semiconductor substrate;
forming a hole in the insulating film above the impurity diffusion region;
forming a conductive film for plug on an upper surface of the insulating film and in the hole;
leaving the conductive film for plug only in the hole by polishing, and making the conductive film for plug in the hole into a conductive plug which is electrically connected to the impurity diffusion region;
forming an underlying conductive film on each of the upper surfaces of the insulating film and the conductive plug;
polishing an upper surface of the underlying conductive film to planarize the upper surface;
forming a crystalline conductive film on the planarized upper surface of the underlying conductive film; and
forming a capacitor in which a lower electrode, a capacitor dielectric film made of a ferroelectric material, and an upper electrode are laminated in this order on the crystalline conductive film.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein, after planarizing the upper surface of the underlying conductive film, a step of exposing the upper surface of the underlying conductive film to nitrogen-containing plasma is carried out, or a step of exposing the upper surface of the crystalline conductive film to nitrogen-containing plasma is carried out.
3. The method of manufacturing a semiconductor device according to claim 2 , wherein the nitrogen-containing plasma is N 2 O plasma.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein the step of forming the crystalline conductive film includes steps of forming a titanium film on the underlying conductive film, and heating the titanium film in a nitrogen-containing atmosphere to nitride the titanium film.
5. The method of manufacturing a semiconductor device according to claim 4 , further comprising a step of forming an oxide barrier metal film on the crystalline conductive film after the crystalline conductive film is formed, wherein the capacitor is formed on the oxygen barrier metal film in the step of forming the capacitor.
6. The method of manufacturing a semiconductor device according to claim 5 , further comprising a step of carrying out annealing in an oxygen-containing atmosphere for the capacitor dielectric film after the capacitor is formed.
7. The method of manufacturing a semiconductor device according to claim 6 , further comprising a step of etching back portions of the oxygen barrier metal film, the crystalline conductive film, and the underlying conductive film to leave these films under the capacitor in island shapes, where the portions being uncovered by the capacitor.
8. The method of manufacturing a semiconductor device according to claim 7 , further comprising a step of forming a capacitor protect insulating film on the capacitor and the oxygen barrier metal film after the capacitor is formed, and in the step of etching back the oxygen barrier metal film, the capacitor protect insulating film is also subjected to etching back to leave the capacitor protect insulating film only on a side surface of the capacitor.
9. The method of manufacturing a semiconductor device according to claim 8 , wherein an alumina film is formed as the capacitor protect insulating film.
10. The method of manufacturing a semiconductor device according to claim 7 , wherein the etching back is carried out by one of dry etching using a gas mixture containing a CF 4 gas and an O 2 gas, and wet etching using a mixed solution containing H 2 O 2 , NH 3 OH, and a water as an etching liquid.
11. The method of manufacturing a semiconductor device according to claim 5 , wherein the oxygen barrier metal film is any one of a titanium aluminum nitride film, a titanium nitride film, an iridium film, an iridium oxide film, a platinum film, a ruthenium film, and a SRO (SrRuO 3 ) film.
12. The method of manufacturing a semiconductor device according to claim 1 , wherein any one of a tungsten film, a silicon film, a titanium nitride film, and a copper film is formed as the underlying conductive film.
13. The method of manufacturing a semiconductor device according to claim 1 , wherein a titanium nitride film is formed as the crystalline conductive film.