Semiconductor device having an n-channel MOS transistor, a p-channel MOS transistor and a contracting film
View Patent ↗In a second direction, in a plan view, an n-channel MOS transistor and an expanding film are adjacent. Therefore, the n-channel MOS transistor receives a positive stress in the direction in which a channel length is extended from the expanding film. As a result, a positive tensile strain in an electron moving direction is generated in a channel of the n-channel MOS transistor. On the other hand, in the second direction, in a plan view, a p-channel MOS transistor and the expanding film are shifted from each other. Therefore, the p-channel MOS transistor receives a positive stress in the direction in which a channel length is narrowed from the expanding film. As a result, a positive compressive strain in a hole moving direction is generated in a channel of the p-channel MOS transistor. Thus, both on-currents of the n-channel MOS transistor and the p-channel MOS transistor can be improved.
1. A semiconductor device comprising:
a semiconductor substrate;
an n-channel MOS transistor formed in a first region on a surface of said semiconductor substrate;
a p-channel MOS transistor formed in a second region on said surface of said semiconductor substrate; and
a contracting film formed in a third region on said surface of said semiconductor substrate, and not formed in said first region, said second region and a fourth region, wherein
said first region is in contact with said third region in a first direction,
said second region is in contact with said third region in a second direction perpendicular to said first direction,
said fourth region is in contact with said first region in said second direction and is in contact with said second region in said first direction,
a channel width direction of said n-channel MOS transistor is parallel to said second direction,
a channel width direction of said p-channel MOS transistor is parallel to said second direction, and
said first direction and said second direction are perpendicular to a normal line to said surface of said semiconductor substrate.
2. The semiconductor device according to claim 1 , wherein a height of a surface of said contracting film is higher than a height of said surface of said semiconductor substrate.
3. The semiconductor device according to claim 1 , further comprising an insulating film covering said fourth region, and not formed in said third region, said insulating film having a first stress different from a second stress of said contracting film.
4. A semiconductor device comprising:
a semiconductor substrate;
a first n-channel MOS transistor formed on said semiconductor substrate;
a p-channel MOS transistor formed on said semiconductor substrate
an element isolation insulating film formed on said semiconductor substrate, said element isolation insulating film comprising:
a first portion being in contact with said first n-channel MOS transistor in a first direction and being in contact with said p-channel MOS transistor in a second direction; and
a second portion being in contact with said first n-channel MOS transistor in said second direction and being in contact with said p-channel MOS transistor in said first direction; and
a contracting film formed on said first portion, and not formed on said second portion, wherein
a channel width direction of said first n-channel MOS transistor is parallel to said second direction, and
a channel width direction of said p-channel MOS transistor is parallel to said second direction.
5. The semiconductor device according to claim 4 , further comprising:
a second n-channel MOS transistor formed on said semiconductor substrate, and being in contact with said first portion in said first direction, wherein
said first n-channel MOS transistor and said second n-channel MOS transistor are located in a line in said first direction, and
said first portion is between said first n-channel MOS transistor and said second n-channel MOS transistor.
6. The semiconductor device according to claim 4 , wherein a height of a surface of said contracting film is higher than a height of a surface of said semiconductor substrate.
7. The semiconductor device according to claim 4 , further comprising an insulating film covering said second portion, and not formed in said first portion, said insulating film having a first stress different from a second stress of said contracting film.