Composite stamper for imprint lithography
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.
1. A method of manufacturing a production stamper for imprinting a recording disk, comprising:
generating a patterned layer comprising a hard material and having a first diameter, the patterned layer having a back plane bounded by an outer wall forming a cavity, the patterned layer comprising a hard material, the patterned layer having a first thickness in a range of 1 to 300 microns; and
directly bonding an elastomer on the back plane of the patterned layer within the cavity of the outer wall, the elastomer having a second thickness being approximately equal to or greater than the first thickness of the patterned layer, the second thickness being greater than 300 microns, the elastomer having a second diameter being less than the first diameter, wherein
the hard material has a hardness value in a range of HV100 to HV1000, and
the elastomer having a hardness value in a range of 20 to 55 Shore 00 scale or 10 to 100 on Shore A scale.
2. The method of claim 1 , further comprising curing the elastomer.
3. The method of claim 1 , wherein generating the patterned layer comprises electroplating a master with a metal.
4. The method of claim 2 , wherein curing is performed at a temperature approximately in a range of room temperature to 150 degrees C.