Semiconductor device and method for fabricating the same
A semiconductor device formed by the steps of: forming a dummy electrode 22 n and a dummy electrode 22 p ; forming a metal film 32 on the dummy electrode 22 p ; conducting a thermal treatment at a first temperature to substitute the dummy electrode 22 n with an electrode 34 a of a material containing the constituent material of the metal film 32 ; forming a metal film 36 on the dummy electrode 22 n ; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode 34 a and the metal film 36 does not take place, to substitute the second dummy electrode with an electrode 34 b of a material containing the constituent material of the metal film 36.
1. A semiconductor device comprising:
a first transistor of an n-type including a first gate electrode formed of a first metal silicide, and
a second transistor of a p-type including a second gate electrode formed of a second metal silicide a reaction temperature of which is higher than that of the first metal silicide;
wherein the first gate electrode and the second gate electrode are formed in one continuous pattern.
2. The semiconductor device according to claim 1 , wherein the first metal silicide is titanium silicide.
3. The semiconductor device according to claim 1 , wherein the second metal silicide is a material selected from the group consisting of WSi, ZrSi, HfSi, VSi, NbSi, TaSi, CrSi, MoSi, FeSi, CoSi, NiSi, RuSi, RhSi, PdSi, ReSi, OsSi, IrSi and PtSi.