Semiconductor device having a ferroelectric capacitor
View Patent ↗An ultra-thin semiconductor chip of an FeRAM, which is miniaturized and highly integrated with characteristic degradation of a ferroelectric capacitor suppressed though a thin package structure is applied to the FeRAM is realized. The semiconductor chip is molded up by using a sealing resin with a filler content set at a value in a range of 90 weight % to 93 weight % to produce a package structure.
1. A manufacturing method of a semiconductor device, comprising:
a step of forming a semiconductor chip including a memory cell constituted by arranging a plurality of semiconductor elements each including a ferroelectric capacitor structure constituted by sandwiching a ferroelectric film having ferroelectric characteristics with two electrodes; and
a step of sealing the semiconductor chip by using a sealing resin with a filler content of 90 weight % or more to form a thin package structure with a mounting height of 1.27 mm or less.
2. The manufacturing method of a semiconductor device according to claim 1 , wherein the sealing resin has the filler content set at a value in a range of 90 weight % to 93 weight %.
3. The manufacturing method of a semiconductor device according to claim 1 , wherein the sealing resin contains one that is selected from a group constituted of an epoxy resin, a biphenyl resin and a multifunctional resin.
4. The manufacturing method of a semiconductor device according to claim 1 , wherein the filler is one that is selected from a group constituted of silicon oxide, aluminum nitride, boron nitride, aluminum borate, aluminum oxide, magnesium oxide and diamond.
5. The manufacturing method of a semiconductor device according to claim 1 , wherein the fillers are globular fillers.
6. The manufacturing method of a semiconductor device according to claim 5 , wherein the fillers comprise not less than two kinds of globular fillers differing in size.
7. The manufacturing method of a semiconductor device according to claim 1 , wherein the sealing resin contains a single kind of the fillers constituted of a same material or a combination of not less than two kinds of the fillers constituted of different materials.
8. The manufacturing method of a semiconductor device according to claim 1 , wherein in said step of sealing the semiconductor chip with the sealing resin, pressure at which the sealing resin is poured into a mold is set at 75 kg/cm 2 or higher.
9. The manufacturing method of a semiconductor device according to claim 1 , wherein in said step of sealing the semiconductor chip with the sealing resin, a first thermal treatment that is performed at a temperature which is sufficient to complete a cross-linking reaction in the sealing resin, and a second thermal treatment that is performed at a lower temperature than the first thermal treatment before and after the first thermal treatment respectively are applied to the sealing resin which seals the semiconductor chip.
10. The manufacturing method of a semiconductor device according to claim 9 , wherein in said step of sealing the semiconductor chip with the sealing resin, wherein a temperature of a mold into which the sealing resin is poured is adjusted to 140° C. to 170° C.
11. The manufacturing method of a semiconductor device according to claim 1 , wherein in said step of forming the semiconductor chip, a wire bonding treatment is applied to the semiconductor chip at a connection temperature of 220° C. or less.