Solid-state image sensor
View Patent ↗There is provide a divided exposure technology capable of restraining deterioration in the performance of a solid-state image sensor. A photoresist is formed over a semiconductor substrate and subjected to divided exposure. A dividing line for divided exposure is located at least over a region of a semiconductor substrate in which an active region in which a pixel is to be formed is defined. The photoresist is then developed and patterned. By utilizing the patterned photoresist, an element isolation structure for defining the active region in the semiconductor substrate is formed in the semiconductor substrate.
1. A solid-state image sensor, comprising:
a substrate in which a plurality of active regions are defined by element isolation structures; and
a plurality of pixels, each pixel formed in a corresponding active region,
wherein each of the active regions has a plurality of partial active regions in each of which an impurity region is formed, and
wherein, in a top view, at least one pixel in the plurality of pixels differs from at least another pixel in the plurality of pixels by including a partial active region having a shape with a portion displaced in one direction so as to cause a step difference at a periphery of the partial active region.
2. A solid-state image sensor according to claim 1 , wherein a contact plug is not contiguous to the partial active region.
3. A solid-state image sensor according to claim 1 , wherein an interconnect is formed over the substrate and the interconnect has a shape, in a top view, with a portion displaced to cause a step difference at a side surface of the interconnect in the top view.