Semiconductor device
A technique is provided that can prevent cracking of a protective film in the uppermost layer of a semiconductor device and improve the reliability of the semiconductor device. Bonding pads formed over a principal surface of a semiconductor chip are in a rectangular shape, and an opening is formed in a protective film over each bonding pad in such a manner that an overlapping width of the protective film in a wire bonding region of each bonding pad becomes wider than an overlapping width of the protective film in a probe region of each bonding pad.
1. A semiconductor device, comprising:
a semiconductor chip having a principal surface on which a plurality of bonding pads are disposed and a back surface opposite the principal surface,
wherein the principal surface of the semiconductor chip is covered by a protective film in which a plurality of openings are formed,
wherein a peripheral portion of an upper surface each of the bonding pads is covered by the protective film and a portion other than the peripheral portion of the upper surface of each of the bodings pads is exposed from a corresponding one of the openings,
wherein the upper surface of each of the bonding pads is sectioned into a bonding region and a probe region, and
wherein, in a plan view, an overlapping width of the protective film and the peripheral portion of each of the bonding pads in the bonding region is wider than an overlapping width of the protective film and the peripheral portion of each of the bonding pads in the probe region.
2. The semiconductor device according to claim 1 , wherein
an opening in the protective film has a convex shape.
3. The semiconductor device according to claim 2 , further comprising:
a wiring substrate having:
a principal surface in which a plurality of bonding leads are formed; and
a back surface opposing the principal surface;
a pad region in which the bonding pads are disposed along respective sides of the semiconductor chip over the principal surface of the semiconductor chip; and
a core region in which an integrated circuit is formed, in an inner side of the pad region,
wherein:
the semiconductor chip is mounted over the principal surface of the wiring substrate such that the principal surface of the wiring substrate and the back surface of the semiconductor chip face each other;
the bonding pads and the bonding leads are electrically coupled by bonding wires; and
the bonding pads are disposed such that the bonding region is closer to the sides of the semiconductor chip than the probe region.
4. The semiconductor device according to claim 3 , wherein
the bonding wires are electrically coupled respectively to the bonding pads by a bonding technique in which ultrasonic vibration is used together with thermocompression.
5. The semiconductor device according to claim 4 , wherein
the bonding wires are gold wires, and
the bonding pads are metal films containing an aluminum film as a main material.
6. The semiconductor device according to claim 5 , wherein
the protective film is disposed between the adjacent bonding pads.
7. The semiconductor device according to claim 6 , wherein
the protective film is formed of a laminated film in which a plurality of insulating films is formed, and
the insulating film in an uppermost layer is a silicon nitride film.
8. The semiconductor device according to claim 7 , wherein
an overlapping width of the protective film and the periphery of each bonding pad in the bonding region is wider than 2.5 μm.
9. The semiconductor device according to claim 8 , wherein
the overlapping width of the protective film and the periphery of each bonding pad in the bonding region is 5 μm, and
the overlapping width of the protective film and the periphery of each bonding pad in the probe region is 2.5 μm.
10. The semiconductor device according to claim 9 , wherein,
the protective film is formed of a first insulating film having a first thickness, a second insulating film having a second thickness greater than the first thickness over the first insulating film, and a third insulating film as the uppermost layer over the second insulating film;
the periphery of each bonding pad is covered with a laminated film formed of the first insulating film and the second insulating film; and
the third insulating film further covers ends of the first insulating film and the second insulating film over the bonding pad.
11. The semiconductor device according to claim 10 , wherein
an overlapping width of the third insulating film and each of the bonding pads is 2.5 μm.
12. The semiconductor device according to claim 11 , wherein
the semiconductor chip, the bonding wires, and a part of the principal surface of the wiring substrate are sealed with a resin sealing material containing an insulating resin.
13. The semiconductor device according to claim 12 , wherein
the wiring substrate and a resin member constituting the resin sealing material are made of a halogen free member.
14. The semiconductor device according to claim 13 , wherein
the back surface of the wiring substrate is provided with a solder ball.
15. The semiconductor device according to claim 1 , further comprising:
a wiring substrate having a principal surface on which a plurality of bonding leads are formed;
a pad region in which the bonding pads are disposed along respective sides of the semiconductor chip on the principal surface of the semiconductor chip; and
a core region in which an integrated circuit is formed in an inner side of the pad region,
wherein,
the semiconductor chip is mounted over the principal surface of the wiring substrate such that the principal surface of the wiring substrate and the principal surface of the semiconductor chip face each other;
the bonding pads and the bonding leads are electrically coupled by bumps; and
the bonding pads are disposed such that the probe region is closer to the sides of the semiconductor chip than the bonding region.
16. The semiconductor device according to claim 15 , wherein
the integrated circuit includes a CPU, a DSP, a RAM, a PLL, and a DLL.
17. A semiconductor device comprising:
a semiconductor chip having a main surface over which a plurality of bonding pads are formed; and
a wiring member having a top surface over which the semiconductor chip is mounted and is electrically connected to the semiconductor chip,
wherein a peripheral portion of an obverse surface of each of the bonding pads is covered by an insulating film in which a plurality of openings are formed, and a portion other than the peripheral portion of the upper surface of each of the bonding pads is exposed from a corresponding one of the openings,
wherein the obverse surface of each of the bonding pads is sectioned into a bonding region and a probe region, and
wherein, in a plan view, an overlapping width of the insulating film and the peripheral portion of each of the bonding pads in the bonding region is wider than an overlapping width of the insulating film and the peripheral portion of each of the bonding pads in the probe region.
18. The semiconductor device according to claim 17 ,
wherein an area of the part exposed from the opening of the insulating film of the probe region of each bonding pad is larger than an area of the part exposed from the opening of the insulating film of the bonding region of each bonding pad.
19. The semiconductor device according to claim 17 ,
wherein the semiconductor chip is electrically connected to the wiring member via a plurality of metal conductors, and
wherein the plurality of metal conductors are bonded to the bonding regions of corresponding bonding pads.
20. The semiconductor device according to claim 19 ,
wherein the semiconductor chip is mounted over the top surface of the wiring member such that the main surface of the semiconductor chip and the top surface of the wiring member face in the same direction, and
wherein the plurality of metal conductors are metal wires.
21. The semiconductor device according to claim 20 ,
wherein the bonding region of each bonding pad is closer to an outer edge of the semiconductor chip than the probe region of that bonding pad in the plan view.
22. The semiconductor device according to claim 19 ,
wherein the semiconductor chip is mounted over the top surface of the wiring member such that the main surface of the semiconductor chip faces the top surface of the wiring member, and
wherein the plurality of metal conductors are metal bumps.
23. The semiconductor device according to claim 22 ,
wherein the probe region of each bonding pad is closer to an outer edge of the semiconductor chip than the bonding region of that bonding pad in the plan view.