Semiconductor device and method for manufacturing the same
View Patent ↗According to the method for manufacturing a semiconductor device, a surface of a lower insulating film ( 55 ) is planarized by CMP or the like, and an upper insulating film ( 56 ) and a protective metal film ( 59 ) are formed on the lower insulating film ( 55 ). Accordingly, the upper insulating film ( 56 ) and the protective metal film ( 59 ) are formed in such a manner they have an excellent coverage and the water/hydrogen blocking capability of the upper insulating film ( 56 ) and the protective metal film ( 59 ) is maximized.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming, above a semiconductor substrate, a capacitor structure including a lower electrode and an upper electrode that sandwich a dielectric film;
forming, over the capacitor structure, a wiring structure electrically connected to the capacitor structure;
forming a pad electrode electrically connected to the wiring structure;
depositing a first insulating film to cover the pad electrode and planarizing a surface of the insulating film;
forming, on the first insulating film, a second insulating film having a capability of preventing penetration of hydrogen and having a lower etching rate than that of the first insulating film;
forming, in the second insulating film and the first insulating film, an opening exposing a portion of a surface of the pad electrode; and
forming a protective metal film made of a moisture-resistant metal so that the protective metal fills the opening and is coupled to the pad electrode.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein the step of forming the protective metal film forms the protective metal film of a first protective film filling the opening and being connected to the pad electrode and of a second protective film covering an area on the insulating film that surrounds the first protective film and being electrically insulated from the first protective film.
3. The method for manufacturing a semiconductor device according to claim 1 , wherein the step of forming the protective metal film forms the protective metal film in a shape that fills only the opening.
4. The method for manufacturing a semiconductor device according to claim 1 , further comprising, between the step of forming the insulating film and the step of forming the opening, the step of forming, on the insulating film, an upper protecting layer made of an insulating material; wherein
the step of forming the opening forms the opening in the upper protecting layer and the insulating film so that a portion of a surface of the pad electrode is exposed; and
the step of forming the protective metal film forms the protective metal film in a shape that fills only the opening.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein
the insulating film is formed of a lower portion and an upper portion made of a silicon nitride;
the opening is formed by forming a plurality of first openings in the lower portion to expose portions of the pad electrode and forming a second opening in the upper portion so that the second opening is aligned with the first openings; and
the step of forming the protective metal film forms the protective metal film so that the first and second openings are filled with the protective metal film.
6. The method for manufacturing a semiconductor device according to claim 1 , wherein the first insulating film comprises the silicon oxide film and the second insulating film comprises the silicon nitride film.