Semiconductor device and manufacturing method thereof
A first insulation film is provided on a semiconductor substrate. A high resistance element formed from polysilicon is provided on the first insulation film. A second insulation film is provided on the high resistance element. A hydrogen diffusion preventing film having a hydrogen diffusion coefficient smaller than that of the second insulation film is provided on the second insulation film. The hydrogen diffusion preventing film covers a part of the high resistance element.
1. A method of manufacturing a semiconductor device, the method including:
a step of forming a first insulation film on a semiconductor substrate;
a step of forming a high resistance element made of polysilicon on the first insulation film;
a step of forming a second insulation film on the high resistance element; and
a step of forming a hydrogen diffusion preventing film from a material having a hydrogen diffusion coefficient smaller than a hydrogen diffusion coefficient of the second insulation film on the second insulation film, wherein:
the hydrogen diffusion preventing film is formed so as to cover a part of the high resistance element,
the hydrogen diffusion preventing film comprises a plurality of hydrogen diffusion preventing films,
the hydrogen diffusion preventing films are provided in parallel on the second insulation film with an equal interval therebetween, and
the hydrogen diffusion preventing film is provided orthogonal to the high resistance element.
2. The method of manufacturing the semiconductor device as claimed in claim 1 ,
wherein the semiconductor device has a multilayer wiring structure, a conductive film including titanium nitride is formed as the hydrogen diffusion preventing film, and the hydrogen diffusion preventing film is formed at the same time as the formation of at least wiring of a bottom layer in the multilayer wiring structure.
3. The method of manufacturing the semiconductor device as claimed in claim 1 ,
wherein the high resistance element comprises a plurality of elements having an identical shape.
4. The method of manufacturing the semiconductor device as claimed in claim 1 ,
wherein the hydrogen diffusion preventing film is a conductive film including titanium nitride.
5. The method of manufacturing the semiconductor device as claimed in claim 1 ,
wherein the hydrogen diffusion preventing film is an insulation film including silicon nitride.
6. The method of manufacturing the semiconductor device as claimed in claim 1 ,
wherein a potential of the hydrogen diffusion preventing film is in a floating state.
7. The method of manufacturing the semiconductor device as claimed in claim 1 , wherein:
the semiconductor device has a multilayer wiring structure, and
at least wiring of a bottom layer in the multilayer wiring structure constitutes the hydrogen diffusion preventing film.
8. A method of manufacturing a semiconductor device, the method including:
a step of forming a first insulation film on a semiconductor substrate;
a step of forming a high resistance element made of polysilicon on the first insulation film;
a step of forming a second insulation film on the high resistance element; and
a step of forming a hydrogen diffusion preventing film from a material having a hydrogen diffusion coefficient smaller than a hydrogen diffusion coefficient of the second insulation film on the second insulation film, wherein:
the hydrogen diffusion preventing film is formed so as to cover a part of the high resistance element, and
a potential of the hydrogen diffusion preventing film is in a floating state.
9. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the hydrogen diffusion preventing film is a conductive film including titanium nitride, and the hydrogen diffusion preventing film is formed at the same time as the formation of at least wiring of a bottom layer of a semiconductor element having a multilayer wiring structure.
10. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the high resistance elements are constituted by a plurality of elements having an identical shape.
11. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the hydrogen diffusion preventing film is a conductive film including titanium nitride.
12. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the hydrogen diffusion preventing film is an insulating film including silicon nitride.
13. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the hydrogen diffusion preventing film is reed-shaped and the plurality of hydrogen diffusion preventing films are evenly arranged in parallel.
14. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the hydrogen diffusion preventing film is provided orthogonal to the high resistance element.
15. The method of manufacturing the semiconductor device as claimed in claim 8 , wherein
the semiconductor device has a multilayer wiring structure, and at least wiring of a bottom layer in the multilayer wiring structure constitutes the hydrogen diffusion preventing film.