Semiconductor memory device
View Patent ↗In a full CMOS SRAM having a lateral type cell (memory cell having three partitioned wells arranged side by side in a word line extending direction and longer in the word line direction than in the bit line direction) including first and second driver MOS transistors, first and second load MOS transistors and first and second access MOS transistors, two capacitors are arranged spaced apart from each other on embedded interconnections to be storage nodes, with lower and upper cell plates cross-coupled to each other.
1. A semiconductor memory device, comprising:
a word line;
a bit line extending in a direction orthogonal to an extending direction of said word line;
a first well region of a first conductivity type, a second well region of a second conductivity type and a third well region of the first conductivity type arranged side by side in the extending direction of said word line;
a first driver MOS transistor and a first access MOS transistor formed on said first well region;
a first load MOS transistor and a second load MOS transistor formed on said second well region;
a second driver MOS transistor and a second access MOS transistor formed on said third well region;
a first local interconnection formed in an interlayer insulating film covering said first driver MOS transistor, said second driver MOS transistor, said first access MOS transistor, said second access MOS transistor, said first load MOS transistor and said second load MOS transistor, and connecting an active region of said first driver MOS transistor, an active region of said first access MOS transistor and an active region of said first load MOS transistor with a gate electrode of said second driver MOS transistor and a gate electrode of said second load MOS transistor, and having a slanting portion extending in a direction crossing a longitudinal direction of a conductive layer that is to be said gate electrode of said second driver MOS transistor and said gate electrode of said second load MOS transistor at an obtuse angle; and
a second local interconnection formed in said interlayer insulating film, connecting an active region of said second driver MOS transistor, an active region of said second access MOS transistor and an active region of said second load MOS transistor with a gate electrode of said first driver MOS transistor and a gate electrode of said first load MOS transistor, and having a slanting portion extending in a direction crossing a longitudinal direction of another conductive layer that is to be the gate electrode of said first driver MOS transistor and said gate electrode of said first load MOS transistor at an obtuse angle.
2. The semiconductor device according to claim 1 , wherein
said active region of said first driver MOS transistor and said active region of said first access MOS transistor are a same region, and said active region of said second driver MOS transistor and said active region of said second access MOS transistor are a same region.
3. The semiconductor device according to claim 1 , wherein
said active region of said first load MOS transistor and said active region of said second load MOS transistor are not a same region.
4. The semiconductor device according to claim 1 , wherein
said active region of said first driver MOS transistor and said active region of said first access MOS transistor are a same region, said active region of said second driver MOS transistor and said active region of said second access MOS transistor are a same region, and said active region of said first load MOS transistor and said active region of said second load MOS transistor are not a same region.