Method for cleaning post-sputter disks using tape and diamond slurry
View Patent ↗A method for cleaning a post-sputter flat media disk, comprises submerging the disk in a wet conveyor containing a liquid, loading the disk onto a spindle of a spindle system, rotating the disk, engaging the disk on both sides with a pair of rollers such that the disk is wiped on both sides at a disk-roller interface due to the motion of the spindle system, and dispensing a slurry at the disk-roller interface.
1. A method for cleaning a post-sputter flat media disk, comprising:
loading the disk onto a spindle of a spindle system;
rotating the disk;
engaging the disk on both sides with a pair of rollers such that the disk is wiped on both sides at a disk-roller interface due to the motion of the spindle system; and
dispensing a slurry only at the disk-roller interface, wherein the slurry comprises diamond particles suspended in a water and coolant mixture comprising about 5%-20% synthetic coolant and about 80%-95% water.
2. The method of claim 1 , wherein the mixture comprises about 10% synthetic coolant and about 90% water.
3. A The method of claim 1 , wherein the slurry comprises alumina particles suspended in the mixture.
4. The method of claim 1 , wherein the slurry comprises colloidal silica particles suspended in the mixture.
5. The method of claim 1 , wherein tape is provided on an outer surface of the rollers.
6. The method of claim 5 , wherein the tape comprises nylon tape.
7. The method of claim 1 , wherein the spindle system comprises an oscillating spindle system that oscillates at a predetermined frequency.
8. The method of claim 1 , wherein the spindle system comprises an oscillating spindle system that oscillates at a predetermined amplitude.
9. The method of claim 1 , further comprising performing a series of soaking, scrubbing, rinsing and drying operations on the disk.
10. A method for cleaning a post-sputter flat media disk, comprising:
loading the disk onto a spindle of an oscillating spindle system that oscillates at a predetermined frequency and a predetermined amplitude;
rotating the disk;
engaging the disk on both sides with a pair of taped rollers such that the disk is wiped on both sides at a disk-tape interface due to the oscillation of the spindle system;
dispensing a slurry comprising diamond particles suspended in a water and coolant mixture only at the disk-tape interface, wherein the slurry comprises about 5%-20% synthetic coolant and about 80%-95% water; and
performing a series of soaking, scrubbing, rinsing and drying operations on the disk.