Liquid crystal display device
In an IPS-type liquid crystal display device, peeling-off between a common electrode formed in a matted manner in plane and an interlayer insulation film is prevented. The common electrode is formed on an organic passivation film in a matted manner in plane, the interlayer insulation film is formed on the common electrode, and a comb-teeth-shaped pixel electrode is formed on the interlayer insulation film. The pixel electrode is connected with a source electrode via a through hole formed in the organic passivation film and an inorganic passivation film.
1. A liquid crystal display device in which a first insulation film is formed on a source electrode which is connected with a source region of a thin film transistor so as to cover the source electrode, an organic insulation film is formed on the first insulation film, a common electrode is formed on the organic insulation film, a second insulation film is formed on the common electrode so as to cover the common electrode, and a pixel electrode which has a comb-teeth-shaped portion is formed on the second insulation film, wherein
the organic insulation film and the first insulation film have a through hole having a large hole corresponding to an upper portion of the organic insulation film, a small hole corresponding to the first insulation film and an inclined portion formed in the organic insulation film,
a first opening portion is formed in the second insulation film such that the first opening portion surrounds the large hole of the through hole,
a second opening portion is formed in the common electrode such that the second opening portion surrounds the large hole of the through hole,
the pixel electrode is connected with the source electrode via the through hole,
the first opening portion which is formed in the second insulation film is larger than the large hole formed in the organic insulation film and is smaller than the second opening portion formed in the common electrode,
an edge portion of the second insulation film extends beyond an edge of the common electrode towards the large hole formed in the organic insulation film a distance that is greater than a thickness of the second insulation film, and
an entirety of a part of a lower surface of the pixel electrode which surrounds the first opening portion has contact with an upper surface of the second insulation film.
2. The liquid crystal display device according to claim 1 , wherein in the through hole, the small hole formed in the first insulation film is formed by etching using the organic insulation film as a mask.
3. The liquid crystal display device according to claim 1 , wherein the first insulation film and the second insulation film are formed using SiN.
4. The liquid crystal display device according to claim 1 , wherein the second insulation film is formed using SiN at a temperature of not more than 300° C.
5. A liquid crystal display device in which a first insulation film is formed on a source electrode which is connected with a source region of a thin film transistor so as to cover the source electrode, an organic insulation film is formed on the first insulation film, a common electrode is formed on the organic insulation film, a second insulation film is formed on the common electrode so as to cover the common electrode, and a pixel electrode which has a comb-teeth-shaped portion is formed on the second insulation film, wherein
the organic insulation film and the first insulation film have a through hole having a large hole corresponding to an upper portion of the organic insulation film, a small hole corresponding to the first insulation film and an inclined portion formed in the organic insulation film,
an opening portion is formed in the second insulation film in the vicinity of the through hole,
the pixel electrode is connected with the source electrode via the through hole, and
the opening portion which is formed in the second insulation film is larger than the small hole formed in the first insulation film,
the second insulation film is not brought into contact with the first insulation film,
an edge portion of the second insulation film extends beyond an edge of the common electrode towards the large hole formed in the organic insulation film a distance that is greater than a thickness of the second insulation film, and
an entirety of a part of a lower surface of the pixel electrode which surrounds the first opening portion has contact with an upper surface of the second insulation film.
6. The liquid crystal display device according to claim 5 , wherein the first insulation film and the second insulation film are formed using SiN.
7. The liquid crystal display device according to claim 5 , wherein the second insulation film is formed using SiN at a temperature of not more than 300° C.