Semiconductor device semiconductor device testing method, and data processing system

1. A semiconductor device comprising:

an interface chip;

a core chip; and

a measurement-target signal line and a reference signal line each including a through electrode penetrating through the core chip and each having a first end provided on the core chip and a second end provided on the interface chip, wherein

the interface chip includes a first signal generation circuit that generates a test clock,

the core chip includes a second signal generation circuit that generates a measurement signal in synchronization with the test clock, and outputs the measurement signal to the first ends on the core chip of the measurement-target signal line and the reference signal line, and

the interface chip further includes a determination circuit that outputs a test result signal based on a phase difference between measurement signals respectively appearing at the second ends on the interface chip of the measurement-target signal line and the reference signal line.

2. The semiconductor device as claimed in claim 1 , wherein

the interface chip further includes a phase comparison circuit that detects the phase difference in the measurement signals, and

the determination circuit generates the test result signal based on a detection result of the phase comparison circuit.

3. The semiconductor device as claimed in claim 2 , wherein the interface chip further includes a delay element provided between the phase comparison circuit and the second end of the reference signal line.

4. The semiconductor device as claimed in claim 2 , wherein

the second signal generation circuit generates a plurality of measurement signals in time series,

the determination circuit includes a plurality of storage circuits storing a plurality of detection results output from the phase comparison circuit respectively related to the plurality of measurement signals, and

the determination circuit generates the test result signal based on the detection results stored in the storage circuits.

5. The semiconductor device as claimed in claim 2 , wherein

the test clock has at least one active edge making a first transition from a first potential to a second potential or a second transition from the second potential to the first potential or a plurality of active edges making the first and second transitions,

the measurement signal is a signal having an active edge corresponding to the active edge of the test clock, and

the phase comparison circuit detects the phase difference based on the active edge of the measurement signal appearing at the second end of the measurement-target signal line and the active edge of the measurement signal appearing at the second end of the reference signal line.

6. The semiconductor device as claimed in claim 5 , wherein

the test clock has a plurality of active edges making a plurality of the first transitions or a plurality of the second transitions, and

the determination circuit generates the test result signal based on a plurality of the detection results of the phase comparison circuit obtained respectively for the active edges.

7. The semiconductor device as claimed in claim 6 , wherein

the test clock has active edges making the first and second transitions, and

the determination circuit generates the test result signal based on a plurality of the detection results of the phase comparison circuit obtained respectively for the active edges.

8. The semiconductor device as claimed in claim 1 , wherein

a plurality of the core chips mutually stacked are provided,

a plurality of the through electrodes penetrating through different core chips are electrically connected in series, thereby a plurality of the measurement-target signal lines and a plurality of the reference signal lines are configured by the through electrodes electrically connected in series,

each of the core chips further includes a chip-selection reception circuit that receives a selection signal to select one of core chips from the interface chip,

each of the second signal generation circuits provided on the core chips outputs the measurement signal to the first ends of a corresponding measurement-target signal line and a corresponding reference signal line when a corresponding core chip is selected by the chip-selection reception circuit, and

each of the second signal generation circuits provided on the core chips does not output the measurement signal to the first ends of the corresponding measurement-target signal line and the corresponding reference signal line when the corresponding core chip is not selected by the chip-selection reception circuit.

9. The semiconductor device as claimed in claim 1 , further comprising a plurality of the measurement-target signal lines provided in parallel, wherein

the core chip further includes a first selector that receives a first selection signal to select one of the measurement-target signal lines, and outputs the measurement signal generated by the second signal generation circuit to a selected one of the measurement-target signal lines.

10. The semiconductor device as claimed in claim 9 , wherein

the measurement-target signal lines are grouped into a plurality of groups,

a plurality of the first selectors are provided respectively corresponding to the groups, and

the core chip further includes a third selector that receives a third selection signal to select one of the groups, and outputs the measurement signal generated by the second signal generation circuit to the first selector corresponding to a selected one of the groups.

11. The semiconductor device as claimed in claim 10 , wherein a plurality of the reference signal lines are assigned for each of the groups.

12. The semiconductor device as claimed in claim 9 , wherein the reference signal line is assigned for the plural measurement-target signal lines.

13. The semiconductor device as claimed in claim 1 , further comprising a plurality of the measurement-target signal lines provided in parallel, wherein

the interface chip further includes a second selector that receives a second selection signal to select one of the measurement-target signal lines, and outputs the measurement signal output from a selected one of the measurement-target signal lines to the determination circuit.

14. The semiconductor device as claimed in claim 13 , wherein

the measurement-target signal lines are grouped into a plurality of groups,

a plurality of the second selectors are provided respectively corresponding to the groups, and

the interface chip further includes a fourth selector that receives a fourth selection signal to select one of the groups, and outputs the measurement signal output from the second selector corresponding to a selected one of the groups to the determined circuit.

15. The semiconductor device as claimed in claim 1 , further comprising a plurality of the measurement-target signal lines provided in parallel, wherein

the core chip further includes a first selector that receives a first selection signal to select one of the measurement-target signal lines, and outputs the measurement signal generated by the second signal generation circuit to a selected one of the measurement-target signal lines,

the interface chip further includes a second selector that receives a second selection signal to select one of the measurement-target signal lines, and outputs the measurement signal output from a selected one of the measurement-target signal lines to the determination circuit,

the measurement-target signal lines are grouped into a plurality of groups,

a plurality of the first selectors are provided respectively corresponding to the groups, and

the core chip further includes a third selector that receives a third selection signal to select one of the groups, and outputs the measurement signal generated by the second signal generation circuit to the first selectors corresponding to a selected one of the groups,

a plurality of the second selectors are provided respectively corresponding to the groups, and

the interface chip further includes a fourth selector that receives a fourth selection signal to select one of the groups, and outputs the measurement signals output from the second selectors corresponding to a selected one of the groups to the determined circuit.

16. The semiconductor device as claimed in claim 15 , wherein

a plurality of the reference signal lines are assigned for each of the groups,

the third selector outputs the measurement signal generated by the second signal generation circuit to the reference signal line corresponding to the selected group, and

the fourth selector outputs the measurement signal output from the reference signal line corresponding to the selected group to the determination circuit.

17. The semiconductor device as claimed in claim 1 , further comprising a first signal line that includes a through electrode penetrating through the core chip and connected between the first signal generation circuit and the second signal generation circuit, wherein

the test clock output from the first signal generation circuit is supplied to the second signal generation circuit via the first signal line.

18. The semiconductor device as claimed in claim 1 , wherein

the first signal generation circuit further generates a test trigger indicating a test mode,

the semiconductor device further comprises a second signal line that includes a through electrode penetrating through the core chip and connected between the first signal generation circuit and the second signal generation circuit,

the test trigger output from the first signal generation circuit is supplied to the second signal generation circuit via the second signal line, and

the second signal generation circuit determines whether to generate the measurement signal based on the test trigger.

19. The semiconductor device as claimed in claim 1 , further comprising:

an external terminal with which the semiconductor device communicates with outside; and

a first circuit included in the interface chip having an input terminal and an output terminal, wherein

the external terminal is connected to the input terminal of the first circuit, and

the output terminal of the first circuit is connected to the second end of the measurement-target signal line.

20. A testing method of a semiconductor device comprising:

providing the semiconductor device that includes a core chip including a plurality of through electrodes penetrating therethrough and an interface chip stacked on the core chip, the through electrodes constitute a first signal line, a measurement-target signal line, and a reference signal line that are connected between the core chip and the interface chip, respectively;

outputting a test clock having a predetermined cycle from the interface chip to the first signal line;

generating a measurement signal in the core chip in synchronization with the test clock supplied via the first signal line and outputting the measurement signal to the measurement-target signal line and the reference signal line in a simultaneous manner; and

detecting a phase difference of a plurality of the measurement signals on the interface chip respectively supplied via the measurement-target signal line and the reference signal line.