Method for manufacturing a semiconductor device
View Patent ↗In an exposure step, a combination of a first photomask and a second mask is used. The first mask has a real pattern corresponding to the pattern actually formed on the film to be processed, and a dummy pattern added for controlling pattern pitch in the first photomask within a prescribed range; and the second photomask has a pattern isolating a real-pattern-formed region from a dummy-pattern-formed region. In forming the pattern, after forming a film to be processed on a substrate, a first mask is formed on the film to be processed,by lithography, using the first photomask, and a second mask is formed on the film to be processed, by lithography, using the second photomask. Thereafter, the film to be processed is etched and removed using the first and second masks as masks to form the pattern.
1. A method for manufacturing a semiconductor device, the method comprising:
forming a film on a substrate;
forming a first hard mask material over said film;
forming and patterning a first resist film, as a first resist pattern, on said first hard mask material, wherein said first resist pattern covers only some of said first hard mask material and leaves part of said first hard mask material exposed and not covered by said first resist pattern;
after forming said first resist pattern, etching and removing the part of said first hard mask material not covered by said first resist pattern, using said first resist pattern as an etching mask, leaving first parts of said film exposed and not covered by said first hard mask material, thereby forming a first hard mask of said first hard mask material;
after the etching and removing of the part of said first hard mask material not covered by said first resist pattern and forming said first hard mask, forming a second hard mask material that is in physical contact with the first parts of said film that are exposed and not covered by said first hard mask, and on said first hard mask;
after forming said second hard mask material, forming and patterning a second resist film as a second resist pattern, on said second hard mask material, wherein said second resist pattern covers only some of said second hard mask material and leaves part of said second hard mask material exposed and not covered by said second resist pattern;
after forming said second resist pattern, etching and removing the part of said second hard mask material exposed and not covered by said second resist pattern, using said second resist pattern as an etching mask, leaving at least some of the first parts of said film exposed and not covered by either of said first and second hard mask materials, without substantially etching said first hard mask, thereby forming a second hard mask and leaving a part of said first hard mask that extends laterally beyond said second hard mask, and that is exposed and not covered by said second hard mask material; and
after etching and removing the part of said second hard mask material exposed and not covered by said second resist pattern, etching and removing the first parts of said film that are exposed and not covered by at least one of said first and second hard masks, using, in combination, said first and said second hard masks as etching masks.
2. The method according to claim 1 wherein said first and second hard mask materials have different etching characteristics.
3. The method according to claim 2 wherein said first hard mask material is silicon nitride and said second hard mask material is silicon oxide.
4. The method according to claim 1 , wherein
forming said first hard mask material includes forming a real pattern on said film and forming a dummy pattern on said film for controlling pattern pitch of said real pattern, and
forming said second resist pattern so that said second resist pattern covers said dummy pattern.