Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device includes a memory element including a stack structure stacking an insulator film and a metal film or a metal compound film; and a transistor including a gate structure having an identical stack structure as that of the memory element.
1. A semiconductor device comprising:
a memory element including a stack structure stacking an insulator film, and a metal film or a metal compound film, the metal film or the metal compound film being provided over the insulator film;
a transistor including a gate structure having an identical stack structure as that of the memory element;
one first power-source-side contact plug coupled to the upper surface of the metal film or the metal compound film;
one ground-side contact plug coupled to the upper surface of the metal film or the metal compound film; and
one second power-source-side contact plug coupled to the lower surface of the insulator film,
wherein the insulator film provided in the memory element is an anti-fuse element programmed into a first state by breaking thereof, and the metal film or the metal compound film provided in the memory element is a fuse element programmed into a second state by breaking thereof.
2. The semiconductor device according to claim 1 , wherein the metal compound film is a metal silicide film, and the memory element further includes a polysilicon film stacked on the insulator film and the metal silicide film stacked on the polysilicon film.
3. The semiconductor device according to claim 2 , further comprising a programming circuit that programs the anti-fuse element and the fuse element.
4. The semiconductor device according to claim 2 , further comprising sense circuit that distinguishes a state of the anti-fuse element and the fuse element.
5. The semiconductor device according to claim 1 , wherein the stack structure of the memory element is a stack structure stacking the metal film or the metal compound film on the insulator film, and the metal film or the metal compound film has a width narrower at a portion thereof in the vicinity of the first power-source-side contact plug than the width of a remaining portion thereof.
6. The semiconductor device according to claim 5 , further comprising sense circuit that distinguishes a state of the anti-fuse element and the fuse element.
7. The semiconductor device according to claim 1 , further comprising a programming circuit that programs the anti-fuse element and the fuse element.
8. The semiconductor device according to claim 1 , further comprising sense circuit that distinguishes a state of the anti-fuse element and the fuse element.
9. The semiconductor device according to claim 1 , wherein the first power-source-side contact plug is electrically coupled to the ground-side contact plug via the metal film or the metal compound film, and the second power-source-side contact plug is electrically coupled to the ground-side contact plug via the insulator film.