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App. No. 13/076,949 · Confirmation No. 4712

DISK HANDLING APPARATUS AND METHOD FOR SUPPORTING A DISK DURING MATERIAL DEPOSITION AT A DEPOSITION STATION

Inventor: Khoon H. Chean
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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Quick Facts
App. No.
13/076,949
Filed
2011-03-31
Granted
2016-04-12
Art Unit
1756
PTA
0 days