Semiconductor device having metal posts non-overlapping with other devices and layout method of semiconductor device
View Patent ↗A semiconductor device that is resin-sealed in a wafer level after a rewiring layer forming process and a metal post forming process forming a metal post are performed on a semiconductor substrate of the semiconductor device includes devices formed on the semiconductor substrate. Further all of the devices are disposed in respective positions other than positions overlapping a peripheral border of the metal post when viewed from a top of the semiconductor substrate.
1. A semiconductor device that is resin-sealed in a wafer level after a rewiring layer forming process and a metal post forming process forming a metal post are performed on a semiconductor substrate of the semiconductor device, the semiconductor device including active devices formed on the semiconductor substrate,
wherein all of the devices are disposed in respective positions other than positions overlapping a peripheral border of the metal post which is surrounded by said active devices, when viewed from a top of the semiconductor substrate, and
wherein the metal post is disposed on an electrode pad.
2. The semiconductor device according to claim 1 ,
wherein all of the devices are disposed in respective positions other than positions within a predetermined distance from the peripheral border of the metal post.
3. The semiconductor device according to claim 1 ,
wherein all of the devices are disposed in respective positions other than positions overlapping a range within the peripheral border of the metal post.
4. The semiconductor device according to claim 1 ,
wherein the devices constitute an analog circuit.
5. A layout method for a semiconductor device that is resin-sealed in a wafer level after a rewiring layer forming process and a metal post forming process forming a metal post are performed on a semiconductor substrate of the semiconductor device, the semiconductor device including active devices formed on the semiconductor substrate, the layout method comprising:
disposing the metal post on an electrode pad, and
disposing the devices in a manner that all of the devices are disposed in respective positions other than positions overlapping a peripheral border of the metal post which is surrounded by said active devices, when viewed from a top of the semiconductor substrate.
6. The layout method according to claim 5 ,
wherein, in the disposing, all of the devices are disposed in positions other than positions within a predetermined distance from the peripheral border of the metal post.
7. The layout method according to claim 5 ,
wherein, in the disposing, all of the devices are disposed in positions other than positions overlapping a range within the peripheral border of the metal post.
8. The layout method according to claim 5 ,
wherein the devices constitute an analog circuit.
9. The layout method according to claim 5 , further comprising:
determining an layout prohibited region based on a position of the metal post,
wherein, in the disposing, the devices are disposed in a manner that all of the devices are disposed in respective positions in regions other than the layout prohibited region.
10. A semiconductor device that is resin-sealed in a wafer level after a rewiring layer forming process and a metal post forming process forming a metal post are performed on a semiconductor substrate of the semiconductor device, the semiconductor device including active devices formed on the semiconductor substrate,
wherein all of the active devices are disposed in respective positions other than positions overlapping a peripheral border of the metal post which is surrounded by said active devices, when viewed from a top of the semiconductor substrate,
wherein the metal post is disposed on an electrode pad, and
wherein the active devices are comprised of at least a part of an analog circuit.