Magnetic stack with oxide to reduce switching current
View Patent ↗A magnetic stack having a ferromagnetic free layer, a metal oxide layer that is antiferromagnetic at a first temperature and non-magnetic at a second temperature higher than the first temperature, a ferromagnetic pinned reference layer, and a non-magnetic spacer layer between the free layer and the reference layer. During a writing process, the metal oxide layer is non-magnetic. For magnetic memory cells, such as magnetic tunnel junction cells, the metal oxide layer provides reduced switching currents.
1. A method of forming a magnetic stack, the method comprising:
forming a ferromagnetic pinned reference layer, a ferromagnetic free layer, and a non-magnetic spacer therebetween; and
forming a metal oxide layer directly on the free layer, the metal oxide layer being antiferromagnetic at a first temperature and non-magnetic at a second temperature, the second temperature being greater than the first temperature.
2. A method of forming a magnetic stack, the method comprising:
forming a ferromagnetic pinned reference layer, a ferromagnetic free layer, and a non-magnetic spacer therebetween; and
forming a metal oxide layer on the free layer by oxidizing a portion of the ferromagnetic free layer, the metal oxide layer being antiferromagnetic at a first temperature and non-magnetic at a second temperature, the second temperature being greater than the first temperature.
3. The method of claim 2 , wherein the thickness of the metal oxide layer can be controlled by the level of oxygen present during oxidation of the free layer, the temperature during oxidation of the free layer, the duration of the oxidation of the free layer, or combinations thereof.
4. The method of claim 2 , wherein oxidizing comprises oxidizing in an oxygen rich environment and further comprising heating the free layer.
5. The method of claim 1 , wherein the free layer is oxidized with plasma oxidation.
6. The method of claim 5 , wherein the plasma oxidation is oxygen (O 2 ) plasma oxidation.
7. The method of claim 6 , wherein the thickness of the metal oxide layer can be controlled by the O 2 pressure, the temperature during plasma oxidation, the plasma power, or combinations thereof.
8. The method of claim 1 , wherein forming a metal oxide layer comprises depositing via reactive sputtering the metal oxide layer on the free layer.
9. A method of forming a magnetic stack, the method comprising:
forming a ferromagnetic pinned reference layer, a ferromagnetic free layer, and a non-magnetic spacer therebetween; and
forming a metal oxide layer on the free layer, the metal oxide layer being antiferromagnetic at a first temperature and non-magnetic at a second temperature, the second temperature being greater than the first temperature,
wherein the metal oxide comprises a metal element and the ferromagnetic free layer comprises a metal element and the metal elements in the metal oxide and the ferromagnetic free layer are not the same.
10. A method of forming a magnetic stack, the method comprising:
forming a ferromagnetic pinned reference layer, a ferromagnetic free layer, and a non-magnetic spacer therebetween; and
forming a metal oxide layer on the free layer, the metal oxide layer being antiferromagnetic at a first temperature and non-magnetic at a second temperature, the second temperature being greater than the first temperature, wherein the metal oxide layer is formed by oxidizing a portion of the ferromagnetic free layer.
11. The method of claim 10 , wherein oxidizing comprises oxidizing in an oxygen rich environment and further comprising heating the free layer.
12. The method of claim 10 , wherein the free layer is oxidized with plasma oxidation.
13. The method of claim 12 , wherein the plasma oxidation is oxygen (O 2 ) plasma oxidation.
14. The method of claim 13 , wherein the thickness of the metal oxide layer can be controlled by the O 2 pressure, the temperature during plasma oxidation, the plasma power, the duration of oxidation, or combinations thereof.
15. The method of claim 10 , wherein the ferromagnetic pinned reference layer, the ferromagnetic free layer, and the non-magnetic spacer are formed using thin film techniques.
16. The method of claim 15 , wherein the thin film techniques are chosen from chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), or combinations thereof.
17. A method of forming a magnetic stack, the method comprising:
forming a ferromagnetic pinned reference layer, a ferromagnetic free layer, and a non-magnetic spacer therebetween; and
forming a metal oxide layer on the free layer, the metal oxide layer being antiferromagnetic at a first temperature and non-magnetic at a second temperature, the second temperature being greater than the first temperature, wherein the metal oxide layer is formed by oxidizing a portion of the ferromagnetic free layer using plasma oxidation.
18. The method of claim 17 , wherein the plasma oxidation is oxygen (O 2 ) plasma oxidation.
19. The method of claim 18 , wherein the thickness of the metal oxide layer can be controlled by the O 2 pressure, the temperature during plasma oxidation, the plasma power, or combinations thereof.
20. The method of claim 17 , wherein the thickness of the metal oxide layer can be controlled by the O 2 pressure, the temperature during plasma oxidation, the plasma power, the duration of oxidation or combinations thereof.