Forming a bridging feature using chromeless phase-shift lithography
View Patent ↗First and second anchor features are formed on a photolithography mask, each having a respective center point. An elongated, chromeless, bridging feature is formed between the anchor features. The bridging feature is offset from the center points of the anchor feature to minimize distortions of a corresponding photoresist feature formed by the bridging feature.
1. A method comprising:
forming first and second anchor features on a photolithography mask, each having a respective center point;
forming an elongated, chromeless, bridging feature between the anchor features, wherein the bridging feature is offset from the center points of the anchor feature to minimize distortions of a corresponding photoresist feature formed by the bridging feature; and
forming a feature of a read/write head using a region of interest of the corresponding photoresist feature.
2. The method of claim 1 , wherein the corresponding photoresist feature extends between center points of respective anchor photoresist features formed by the first and second anchor features of the photolithography mask.
3. The method of claim 1 , wherein the corresponding photoresist feature is a line, and wherein the offset minimizes bending along a length of the corresponding photoresist feature.
4. The method of claim 1 , wherein the first and second anchor features are formed from an opaque material.
5. The method of claim 1 , wherein a span of the corresponding photoresist feature is at least ten times greater than a width of the corresponding photoresist feature.
6. The method of claim 5 , wherein the width of the corresponding photoresist feature is between 30 nm and 50 nm.
7. A photolithography mask, comprising:
first and second anchor features each having a respective center point; and
an elongated, chromeless, bridging feature extending between the anchor features, wherein the bridging feature is offset from the center points of the anchor feature to minimize distortions of a corresponding photoresist feature formed by the bridging feature;
wherein a region of interest of the corresponding photoresist feature is used to form a feature of a read/write head.
8. The photolithography mask of claim 7 , wherein the corresponding photoresist feature extends between center points of respective anchor photoresist features formed by the first and second anchor features of the photolithography mask.
9. The photolithography mask of claim 7 , wherein the bridging feature is a line, and wherein the offset minimizes bending along a length of the corresponding photoresist feature.
10. The photolithography mask of claim 7 , wherein the first and second anchor features comprise an opaque material.
11. The photolithography mask of claim 7 , wherein a span of the corresponding photoresist feature is at least ten times greater than a width of the corresponding photoresist feature.
12. The photolithography mask of claim 11 , wherein the width of the corresponding photoresist feature is between 30 nm and 50 nm.
13. An article of manufacture comprising a read/write head prepared by a process comprising:
forming photoresist anchor features on the article of manufacture via first and second anchor features of a photolithography mask, each of the first and second anchor features having a respective center point;
forming a bridging photoresist feature on the article of manufacture between the anchor features via a bridging feature of the photolithography mask, wherein the bridging feature is offset from the center points of the anchor feature to minimize distortions of the bridging photoresist feature; and
forming a feature of the read/write head using a region of interest of the bridging feature.
14. The article of manufacture of claim 13 , wherein a width of the bridging photoresist feature is between 30 nm and 50 nm, and wherein a span of the bridging photoresist feature is at least ten times greater than the width of the bridging photoresist feature.
15. The article of manufacture of claim 13 , wherein the bridging photoresist feature extends between center points of the photoresist anchor features.
16. The article of manufacture of claim 13 , wherein the bridging photoresist feature is a line, and wherein the offset minimizes bending along a length of the bridging photoresist feature.
17. The article of manufacture of claim 13 , wherein the first and second anchor features comprise an opaque material.