Long semiconductor laser cavity in a compact chip
View Patent ↗Long semiconductor laser cavities are placed in relative short length chips through the use of total internal reflection (TIR) surfaces formed through etched facets. In one embodiment, a laser cavity is formed along the perimeter edges of a rectangular semiconductor chip by using three 45° angled TIR facets to connect four legs of a ridge or buried heterostructure (BH) waveguide that defines the laser cavity. In other embodiments, even more TIR facets and waveguide legs or sections are employed to make even longer laser cavities in the shape of rectangular or quadrilateral spirals. These structures are limited in the spacing of adjacent waveguide sections, which if too small, can cause undesirable coupling between the sections. However, use of notches etched between the adjacent sections have been shown to decrease this coupling effect.
1. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate;
a first laser cavity formed by a waveguide in said first laser epitaxial structure; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said cavity having a length greater than said chip length;
said cavity having an etched front output facet and an etched back facet; and
wherein at least part of said waveguide is formed along a perimeter of said chip.
2. The semiconductor chip of claim 1 , wherein said waveguide is at a predetermined distance from an edge of the chip.
3. The semiconductor chip of claim 1 , wherein said cavity includes a plurality of legs of said waveguide and said etched back facet is located at a predetermined distance from a different leg of the waveguide than that of a leg of the waveguide terminating in said back facet.
4. The semiconductor chip of claim 1 , wherein said cavity length is selected to allow a bonding pad diameter above a predetermined value.
5. The semiconductor chip of claim 3 , wherein said predetermined distance is above 50 μm.
6. The semiconductor chip of claim 1 , wherein said etched front facet is at a 45±1° angle to said substrate.
7. The semiconductor chip of claim 1 , wherein said etched front facet is at a 90±1° angle to said substrate.
8. The semiconductor chip of claim 1 , wherein said waveguide includes a plurality of legs and the cavity contains one or more total internal reflection (TIR) etched facets that connect said legs.
9. The semiconductor chip of claim 8 , wherein each of said TIR etched facets is at a 45° angle to a corresponding pair of said legs of said waveguide that said TIR etched facet connects.
10. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate;
a first laser cavity formed by a waveguide in said first laser epitaxial structure on said substrate; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
wherein said cavity has a length greater than said chip length, is formed from at least five legs of said waveguide and contains at least four total internal reflection (TIR) etched facets, each of which is at a 45° angle to a corresponding pair of said legs of said waveguide, wherein at least two of said legs of said waveguide are adjacent one another and the distance between the adjacent legs is above a predetermined value; and
said cavity having an etched front output facet and an etched back facet.
11. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate; wherein said epitaxial structure is InAlGaN containing regions of high defect density and regions of low defect density, and wherein said cavity is contained within said regions of low defect density;
a first laser cavity formed by a waveguide in said first epitaxial structure; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said cavity having a length greater than said chip length; and
said cavity having an etched front output facet and an etched back facet.
12. The semiconductor chip of claim 1 , wherein said front facet and said back facet have reflectivity modification through the deposition of dielectric layers at each of said facets.
13. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate;
a first laser cavity formed by a first waveguide in said first laser epitaxial structure, said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said first laser cavity having a length greater than said chip length; and having an etched front output facet and an etched back facet;
a second epitaxial laser structure on said substrate; and
a second laser cavity formed by a second waveguide in said second epitaxial structure; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said second laser cavity having a having an etched front output facet and an etched back facet.
14. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate;
a first laser cavity formed by a first waveguide in said first laser epitaxial structure, said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said first laser cavity having a length greater than said chip length; and having an etched front output facet and an etched back facet;
a second epitaxial laser structure deposited on said first epitaxial laser structure; and
a second laser cavity formed by a second waveguide in said second epitaxial structure; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said second laser cavity having a having an etched front output facet and an etched back facet.
15. The semiconductor chip of claim 14 , wherein said second epitaxial structure is removed from a portion of said first epitaxial structure.
16. The semiconductor chip of claim 15 , wherein said front output facet of said first laser is etched at 45±1° to said substrate and said front facet of said second laser is etched at 45±1° to said substrate.
17. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate;
a first laser cavity formed by a waveguide in said first epitaxial laser structure; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said cavity having a length greater than said chip length;
said cavity having an etched front output facet and an etched back facet; and
wherein said cavity includes a least a first section that is generally rectangular shaped with first, second, third and fourth segments of said waveguide, wherein said back facet is formed at a termination of said fourth segment and a gap is formed between said back facet and said first segment of the waveguide.
18. The semiconductor chip of claim 10 , further comprising an etched notch of a predetermined width and depth formed between adjacent legs of said waveguide.
19. The semiconductor chip of claim 13 , wherein said second cavity comprises at least one TIR facet.
20. A semiconductor chip, comprising:
a substrate having a length defining a length of said chip;
a first epitaxial laser structure on said substrate;
a first laser cavity formed by a waveguide in said epitaxial laser structure; said waveguide being selected from the group comprising a ridge waveguide and a buried heterostructure (BH) waveguide;
said cavity having a quadrilateral spiral shape and a length greater than said chip length; and
said cavity having an etched front output facet and an etched back facet.
21. The semiconductor chip of claim 20 , wherein said first laser cavity has a rectangular spiral shape.