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App. No. 13/354,593 · Confirmation No. 5064

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR FORMING HARD MASK

Inventor: Kazuhiro OKUDA
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2013-12-20 ABN Abandonment 3 View
2013-03-29 CTNF Non-Final Rejection 14 View
2013-03-29 892 List of references cited by examiner 1 View
2013-03-29 SRFW Search information including classification, databases and other search related notes 1 View
2013-03-29 1449 List of References cited by applicant and considered by examiner 4 View
2013-03-29 SRNT Examiner's search strategy and results 19 View
2013-03-29 BIB Bibliographic Data Sheet 1 View
2013-03-29 FWCLM Index of Claims 1 View
2012-08-22 PD.FILED.E Priority Documents electronically retrieved by USPTO from a participating IP Office 31 View
2012-07-26 NTC.PUB Notice of Publication 1 View
2012-06-02 WFEE Fee Worksheet (SB06) 1 View
2012-03-05 APP.FILE.REC Filing Receipt 3 View
2012-03-05 WFEE Fee Worksheet (SB06) 1 View
2012-02-24 PEFR Applicant Response to Pre-Exam Formalities Notice 2 View
2012-02-24 SPEC Specification 21 View
2012-02-24 CLM Claims 5 View
2012-02-24 ABST Abstract 1 View
2012-02-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-23 PEFN Pre-Exam Formalities Notice 1 View
2012-02-23 WFEE Fee Worksheet (SB06) 1 View
2012-02-23 NT.INC.REPLY Notice of Incomplete Reply 2 View
2012-02-22 PEFN Pre-Exam Formalities Notice 2 View
2012-02-15 PEFR Applicant Response to Pre-Exam Formalities Notice 2 View
2012-02-15 SPEC Specification 21 View
2012-02-15 CLM Claims 5 View
2012-02-15 ABST Abstract 1 View
2012-02-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-02-06 WFEE Fee Worksheet (SB06) 1 View
2012-02-06 NT.CR.APP.PA Notice to File Corrected Application Papers 2 View
2012-02-06 APP.FILE.REC Filing Receipt 3 View
2012-01-20 TRNA Transmittal of New Application 1 View
2012-01-20 ADS Application Data Sheet 4 View
2012-01-20 SPEC Specification 21 View
2012-01-20 CLM Claims 5 View
2012-01-20 ABST Abstract 1 View
2012-01-20 DRW Drawings-only black and white line drawings 18 View
2012-01-20 OATH Oath or Declaration filed 2 View
2012-01-20 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2012-01-20 FOR Foreign Reference 18 View
2012-01-20 FOR Foreign Reference 10 View
2012-01-20 FOR Foreign Reference 25 View
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2012-01-20 FOR Foreign Reference 16 View
2012-01-20 WFEE Fee Worksheet (SB06) 2 View
2012-01-20 N417 Electronic Filing System Acknowledgment Receipt 4 View
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Quick Facts
App. No.
13/354,593
Filed
2012-01-20
Pub. No.
US20120190166A1
Art Unit
2897