Method of manufacturing a bit patterned media on a magnetic media disk
A method of forming a bit patterned media on a magnetic media disk may include forming topographic features on a substrate and defining trenches therebetween. The method also may include forming non-magnetic material on the topographic features to define non-magnetic portions. In addition, magnetic material may be formed on the non-magnetic portions to define magnetic portions for a recording layer, such that the magnetic portions have a magnetic width that is greater than a non-magnetic width of the non-magnetic portions.
1. A method of forming a bit patterned media on a magnetic media disk, comprising:
forming topographic features on a substrate and defining trenches therebetween;
forming non-magnetic material on the topographic features to define non-magnetic portions;
forming magnetic material on the non-magnetic portions to define magnetic portions for a recording layer, such that the magnetic portions have a magnetic width that is greater than a non-magnetic width of the non-magnetic portions;
the topographic features comprise islands having a spacing therebetween, and the non-magnetic material located on the islands has a smaller spacing therebetween than the spacing between the islands; and
an aperture is defined between adjacent ones of the islands, one trench is defined in each aperture, and the non-magnetic material reduces a size of each aperture.
2. A method according to claim 1 , further comprising using a deposition angle of incidence other than normal to promote lateral growth of the non-magnetic material, and the non-magnetic width is greater than a feature width of the topographic features.
3. A method according to claim 1 , wherein the topographic features are non-magnetic and have sidewalls on which some of the non-magnetic material is located, and varying a deposition angle with respect to a surface normal to the substrate to mitigate a degree of sidewall overgrowth effects.
4. A method according to claim 1 , further comprising forming non-magnetic material in the trenches at a non-magnetic trench width, and magnetic material on the non-magnetic material in the trenches at a magnetic trench width, and the non-magnetic trench width is greater than the magnetic trench width.
5. A method according to claim 1 , further comprising:
forming a soft underlayer on the substrate, an exchange break layer on the soft underlayer, and the topographic features extend from the exchange break layer such that the trenches also are located on the exchange break layer; and
depositing at least one of thin seed layers, underlayer structures and adhesion layers beneath the magnetic material, either above or below the non-magnetic material.
6. A method of forming a bit patterned media on a magnetic media disk, comprising:
forming topographic features on a substrate and defining trenches therebetween;
forming non-magnetic material on the topographic features to define non-magnetic portions;
forming magnetic material on the non-magnetic portions to define magnetic portions for a recording layer, such that the magnetic portions have a magnetic width that is greater than a non-magnetic width of the non-magnetic portions; wherein
the topographic features comprise islands having a spacing therebetween, and the non-magnetic material located on the islands has a smaller spacing therebetween than the spacing between the islands;
an aperture is defined between adjacent ones of the islands, one trench is defined in each aperture, and the non-magnetic material reduces a size of each aperture;
forming magnetic material in the trenches; and
oxidizing the magnetic material in the trenches to a non-ferromagnetic material, and protecting the magnetic material on the islands with a cap layer to retain magnetic properties thereof.
7. A method according to claim 6 , further comprising using a deposition angle of incidence other than normal to promote lateral growth of the non-magnetic material, and the non-magnetic width is greater than a feature width of the topographic features.
8. A method according to claim 6 , wherein the topographic features are non-magnetic and have sidewalls on which some of the non-magnetic material is located, and varying a deposition angle with respect to a surface normal to the substrate to mitigate a degree of sidewall overgrowth effects.
9. A method according to claim 6 , further comprising forming non-magnetic material in the trenches at a non-magnetic trench width, and magnetic material on the non-magnetic material in the trenches at a magnetic trench width, and the non-magnetic trench width is greater than the magnetic trench width.
10. A method according to claim 6 , further comprising:
forming a soft underlayer on the substrate, an exchange break layer on the soft underlayer, and the topographic features extend from the exchange break layer such that the trenches also are located on the exchange break layer; and
depositing at least one of thin seed layers, underlayer structures and adhesion layers beneath the magnetic material, either above or below the non-magnetic material.