Method of manufacturing semiconductor device including capacitor element

1. A method of manufacturing a semiconductor device, comprising:

forming a first metal film on an insulating film over a semiconductor substrate;

forming a capacitor lower electrode by patterning the first metal film;

forming a dielectric film on an upper surface and side surfaces of the capacitor lower electrode and on the insulating film;

forming a conductive protection film on the dielectric film;

patterning the conductive protection film into a shape of covering the capacitor lower electrode;

forming a capacitor dielectric film in a shape of covering the upper surface and the side surfaces of the capacitor lower electrode, by patterning the dielectric film so that the patterned conductive protection film covers an upper surface of the capacitor dielectric film;

forming a second metal film on the patterned conductive protection film and the insulating film;

forming a capacitor upper electrode that covers at least an upper surface of the patterned conductive protection film, by patterning the second metal film; and

forming a wiring on the insulating film by patterning the second metal film.

2. The method of manufacturing a semiconductor device, according to claim 1 , wherein the capacitor dielectric film and the capacitor upper electrode are patterned by using a mask formed in a same layer.

3. The method of manufacturing a semiconductor device, according to claim 1 , wherein the capacitor upper electrode is patterned by using a mask that overlaps with the capacitor dielectric film and is wider than the capacitor dielectric film.

4. The method of manufacturing a semiconductor device, according to claim 1 , further comprising etching a surface of the insulating film exposed from the patterned conductive protection film.

5. The method of manufacturing a semiconductor device, according to claim 1 , further comprising:

forming a film over a whole surface of the capacitor lower electrode and the insulating film, and forming a sidewall on side surfaces of the capacitor lower electrode by etching the film formed over the whole surface.

6. The method of manufacturing a semiconductor device, according to claim 1 , further comprising:

forming a plug in the insulating film, and

forming a metal pattern of covering the plug, by patterning at least one of the first metal film and the second metal film.

7. The method of manufacturing a semiconductor device, according to claim 1 , further comprising:

forming a fuse in the insulating film, and

forming a protection film that covers the fuse, by patterning the first metal film.

8. The method of manufacturing a semiconductor device, according to claim 7 , further comprising:

etching the protection film over the fuse by using an etchant to pattern the second metal film.

9. The method of manufacturing a semiconductor device, according to claim 1 , further comprising:

forming a first moisture resistant ring formed of a first metal in the insulating film,

forming a second moisture resistant ring connected to the first moisture resistant ring by patterning the first metal film, and

forming a third moisture resistant ring that overlaps with the second moisture resistant ring by patterning the second metal film.