Method for planarizing a perpendicular magnetic recording disk for thermally-assisted recording (TAR)
View Patent ↗A vacuum planarization method substantially improves the surface roughness of a thermally-assisted recording (TAR) disk that has a recording layer (RL) formed of a substantially chemically-ordered FePt alloy or FePt-X alloy (or CoPt alloy or CoPt-X alloy) and a segregant, like SiO 2 . A first amorphous carbon overcoat (OC 1 ) is deposited on the RL and etched with a non-chemically reactive plasma to remove at least one-half the thickness of OC 1 . Then a second amorphous carbon overcoat (OC 2 ) is deposited on the etched OC 1 . The OC 2 is then reactive-ion-etched, for example in a H 2 /Ar plasma, to remove at least one-half the thickness of OC 2 . A thin third overcoat (OC 3 ) may be deposited on the etched OC 2.
1. A method for making a perpendicular magnetic recording disk comprising:
providing a substrate having a perpendicular magnetic recording layer thereon and a first essentially amorphous carbon overcoat on the recording layer, the recording layer comprising a substantially chemically-ordered alloy of Pt and an element selected from Fe and Co;
etching the first overcoat with a non-chemically reactive plasma to remove at least one-half the thickness of the first overcoat, leaving a reduced-thickness first overcoat having an etched surface;
depositing on the etched surface of the reduced-thickness first overcoat a second essentially amorphous carbon overcoat; and
etching the second overcoat with a chemically reactive plasma to remove at least one-half the thickness of the second overcoat, leaving a reduced-thickness second overcoat having an etched surface.
2. The method of claim 1 wherein the recording layer includes a segregant.
3. The method of claim 2 wherein the segregant is selected from SiO 2 , C, B, BN and SiN x .
4. The method of claim 1 wherein the first and second overcoats consist essentially of diamond-like carbon.
5. The method of claim 1 wherein etching the first overcoat with a non-chemically reactive plasma comprises etching with an argon (Ar) plasma.
6. The method of claim 1 wherein etching the second overcoat with a chemically reactive plasma comprises etching with a plasma of Ar and hydrogen (H 2 ).
7. The method of claim 6 wherein the ratio of H 2 to Ar is greater than 7/100.
8. The method of claim 1 wherein the recording layer comprises a substantially chemically-ordered pseudo-binary FePtX alloy in the L1 0 phase, where X is one or more of Ni, Au, Cu, Pd, Mn and Ag.
9. The method of claim 1 wherein the recording layer comprises a substantially chemically-ordered pseudo-binary CoPtX alloy in the L1 0 phase, where X is one or more of Ni, Au, Cu, Pd, Mn and Ag.
10. The method of claim 1 wherein the root-mean-square peak-to-peak surface roughness (Rq) of the first overcoat is greater than 1.0 nm and the Rq of the etched second overcoat is less than 0.5 nm.
11. The method of claim 1 further comprising, after etching the second overcoat, depositing a third overcoat on the etched surface of the second overcoat.
12. The method of claim 11 wherein the third overcoat consists essentially of nitrogenated diamond-like carbon.
13. A method for planarizing a perpendicular magnetic recording disk, the disk having a perpendicular magnetic recording layer comprising a substantially chemically-ordered alloy of Pt and an element selected from Fe and Co and a segregant selected from SiO 2 , C, B, BN and SiN x , and a first essentially amorphous carbon overcoat on the recording layer, the planarizing method comprising:
etching the first overcoat with a non-chemically reactive plasma to remove at least one-half the thickness of the first overcoat, leaving a reduced-thickness first overcoat having an etched surface;
depositing on the etched surface of the reduced-thickness first overcoat a second essentially amorphous carbon overcoat to a thickness of at least 5 nm; and
reactive-ion-etching the second overcoat with a H 2 /Ar plasma wherein the H 2 /Ar ration is equal to or greater than 7/100 to remove at least one-half the thickness of the second overcoat, leaving a reduced-thickness second overcoat having an etched surface.
14. The method of claim 13 wherein etching the first overcoat with a non-chemically reactive plasma comprises etching with an argon (Ar) plasma.
15. The method of claim 13 wherein the recording layer comprises a substantially chemically-ordered pseudo-binary FePtX alloy in the L1 0 phase, where X is one or more of Ni, Au, Cu, Pd, Mn and Ag.
16. The method of claim 13 wherein the recording layer comprises a substantially chemically-ordered pseudo-binary CoPtX alloy in the L1 0 phase, where X is one or more of Ni, Au, Cu, Pd, Mn and Ag.
17. The method of claim 13 wherein the root-mean-square peak-to-peak surface roughness (Rq) of the first overcoat is greater than 1.0 nm and the Rq of the etched second overcoat is less than 0.5 nm.
18. The method of claim 13 further comprising, after etching the second overcoat, depositing a third overcoat on the etched surface of the second overcoat.
19. The method of claim 18 wherein the third overcoat consists essentially of nitrogenated diamond-like carbon.