Method for manufacturing graphene electronics
View Patent ↗An electrical circuit structure employing graphene as a charge carrier transport layer. The structure includes a plurality of graphene layers. Electrical contact is made with one of the layer of the plurality of graphene layers, so that charge carriers travel only through that one layer. By constructing the active graphene layer within or on a plurality of graphene layers, the active graphene layer maintains the necessary planarity and crystalline integrity to ensure that the high charge carrier mobility properties of the active graphene layer remain intact.
1. A method for manufacturing an electrical circuit structure, comprising:
forming first and second electrically conductive contact pads;
forming a plurality of graphene layers, the plurality of graphene layers being electrically separated from the first and second electrically conductive contact layers; and
forming a single graphene layer over the plurality of graphene layers, the single graphene layer extending beyond the plurality of graphene layers to contact the first and second electrically conductive contacts.
2. The method of claim 1 further comprising, before forming the first and second electrically conductive contacts and before forming the graphene layer, providing a substrate and forming first, second and third wells in the substrate; and
wherein the first and second contacts are formed in the first and third wells and the plurality of graphene layers is formed in the second well.
3. The method of claim 2 wherein the single graphene layer extends over the substrate, the plurality of graphene layers and the first and second electrically conductive contacts.
4. The method as in claim 2 wherein the substrate comprises Si.
5. A method for manufacturing an electrical circuit structure, comprising:
forming a plurality of graphene layers;
forming a mask structure over the plurality of graphene layers;
performing a material removal process on a portion of the layers of graphene not protected by the mask, leaving at least one of the graphene layers intact; and
forming an electrically conductive lead structure to contact the at least one intact graphene layer.
6. A method as in claim 5 further comprising, after performing the material removal process and before forming the electrically conductive lead structure, forming an electrically insulating material to cover the removed portions of the graphene layers, while leaving a portion of the at least one intact graphene layer exposed.
7. A method as in claim 5 wherein the electrically conductive lead material contacts the exposed portion of the at least one intact graphene layer.
8. A method as in claim 6 wherein the electrically insulating material is an oxide layer.
9. A method as in claim 5 wherein the at least one intact layer graphene layer is a single layer of graphene disposed at a bottom of the plurality of graphene layers.