Semiconductor device and method for manufacturing the same
View Patent ↗Ferroelectric capacitors ( 42 ) are formed over a semiconductor substrate ( 10 ), then, a barrier film ( 46 ) directly covering the ferroelectric capacitors ( 42 ) is formed. Thereafter, wirings ( 56 a etc.) connected to the ferroelectric capacitors ( 42 ) are formed. Further, a barrier film ( 58 ) is formed at a position higher than the wirings ( 56 a etc.). In forming the barrier film ( 46 ), a film stack is formed, the film stack including at least two kinds of diffusion preventive films ( 46 a and 46 b ) having different components and preventing diffusion of hydrogen or water.
1. A method for manufacturing a semiconductor device, comprising:
forming a ferroelectric capacitor over a semiconductor substrate;
forming a first barrier film directly covering the ferroelectric capacitor;
forming an insulating film over the first barrier film;
planarizing the insulating film;
forming a third barrier film on the insulating film, the third barrier film being a third stacked film including at least two kinds of diffusion preventive films having different components,
forming a first wiring connected to the ferroelectric capacitor;
forming a second barrier film over the first wiring so that a side surface and an upper surface of the first wiring is in direct contact with a lower surface of the second barrier film, the third barrier film being between the first barrier film and the second barrier film,
performing thermal treatment in an oxygen atmosphere after the forming the third barrier film and before the forming the first wiring, and
forming a contact hole that reaches the ferroelectric capacitor in the first barrier film, the insulating film, and the third barrier film after the forming the third barrier film and before the performing the thermal treatment,
wherein the forming the first barrier film comprises forming a first stacked film including at least two kinds of diffusion preventive films having different components, and
wherein the forming the second barrier film comprises forming a second stacked film including a lower layer and an upper layer,
the lower layer being one kind of film selected from a group containing an aluminum oxide film, an aluminum nitride film, and an aluminum oxynitride film, and
the upper layer being one kind of film selected from a group containing a titanium oxide film, a tantalum oxide film, and a zirconium oxide film.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein the forming the first stacked film comprises:
forming one kind of film selected from a group consisting of an aluminum oxide film, an aluminum nitride film, and an aluminum oxynitride film; and
forming, over the film, one kind of film selected from a group consisting of a titanium oxide film, a tantalum oxide film, a zirconium oxide film, and a tantalum nitride film.
3. The method for manufacturing a semiconductor device according to claim 1 , wherein a thickness of each of the diffusion preventive films is from 1 nm to 100 nm.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein as the second barrier film, the second stacked film directly covering the first wiring is formed.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein at least a part of the first wiring is formed by a damascene method using copper.
6. The method for manufacturing a semiconductor device according to claim 5 , further comprising using the second barrier film as an etching stopper film.
7. The method for manufacturing a semiconductor device according to claim 1 , further comprising:
forming a second wiring connected with the first wiring over the first wiring and the second barrier film; and
forming a fourth barrier film formed above the second wiring,
wherein the fourth barrier film is a fourth stacked film including at least two kinds of diffusion preventive films having different components.
8. The method for manufacturing the semiconductor device according to claim 1 , wherein the forming the first stacked film comprises:
forming a first diffusion preventive film;
performing thermal treatment in an atmosphere containing oxygen; and
forming a second diffusion preventive film over the first diffusion preventive film.
9. The method for manufacturing the semiconductor device according to claim 1 , wherein the forming the second stacked film comprises:
forming the lower film;
performing thermal treatment to the lower film in an atmosphere containing oxygen; and
after the performing the thermal treatment, forming the upper film over the lower film.