Semiconductor device and method of manufacturing the same
View Patent ↗A semiconductor device includes a capacitor dielectric film formed on a lower electrode and made of a ferroelectric material, and an upper electrode formed on a capacitor dielectric film, wherein the lower electrode includes a lowest conductive layer and an upper conductive layer, the lowest conductive layer being made of a noble metal other than iridium, and the upper conductive layer being formed on the lowest conductive layer and made of a conductive material, which is different from a material for the lowest conductive layer, and which is other than platinum.
1. A semiconductor device comprising:
a first impurity diffusion region formed in a semiconductor substrate;
a first interlayer insulating film formed over the semiconductor substrate, the first interlayer insulating film having a first hole over the first impurity diffusion region;
a first conductive plug formed in the first hole and electrically connected to the first impurity diffusion region;
an underlying insulating film formed over the first interlayer insulating film, the underlying insulating film having a second hole over the first conductive plug;
a second conductive plug formed in the second hole, and electrically connected to the first conductive plug;
a recessed portion formed on the second conductive plug;
a planarization conductive film formed only in the recessed portion, the planarization conductive film being made of titanium nitride oriented in the (111) direction;
a conductive adhesive film formed on the planarization conductive film;
a crystalline conductive film formed on the conductive adhesive film;
a conductive oxygen barrier film formed on the crystalline conductive film;
a lower electrode formed over the planarization conductive film, where a planar size of the lower electrode is substantially the same as a planar size of the planarization conductive film;
a capacitor dielectric film formed on the lower electrode and made of a ferroelectric material; and
an upper electrode formed on the capacitor dielectric film, wherein the lower electrode comprises a lowest conductive layer and an upper conductive layer,
the lowest conductive layer being made of a noble metal other than iridium, and the upper conductive layer being formed on the lowest conductive layer and made of a conductive material, which is different from a material for the lowest conductive layer, and which is other than platinum.
2. The semiconductor device according to claim 1 , wherein the noble metal constituting the lowest conductive layer is anyone of platinum, rhodium and palladium.
3. The semiconductor device according to claim 1 , wherein the conductive material constituting the upper conductive layer is anyone of iridium, ruthenium, iridium oxide, ruthenium oxide and SrRuO 3 .
4. The semiconductor device according to claim 1 , wherein the lowest conductive layer is thicker than the upper conductive layer.
5. The semiconductor device according to claim 1 , further comprising:
a second impurity diffusion region formed in the semiconductor substrate;
a third conductive plug formed in a third hole provided in the first interlayer insulating film over the second impurity diffusion region, the third conductive plug being electrically connected to the second impurity diffusion region;
a second interlayer insulating film covering a capacitor; and
a fourth conductive plug formed in a fourth hole provided in the second interlayer insulating film over the third conductive plug, the fourth conductive plug being electrically connected to the third conductive plug.
6. The semiconductor device according to claim 1 , wherein the width of the lower electrode is the same as that of the capacitor dielectric film.