Semiconductor device including capacitor
View Patent ↗A substrate is provided with a first wiring layer 111 , an interlayer insulating film 132 on the first wiring layer 111 , a hole 112 A formed in the interlayer insulating film, a first metal layer 112 covering the hole 112 A, a second metal layer 113 formed in the hole 112 A, a dielectric insulating film 135 on the first metal layer 112 , and second wiring layers 114 - 116 on the dielectric insulating film 135 , wherein the first metal layer 112 constitutes at least part of the lower electrode, an area, facing the lower electrode, of the second wiring layers 114 - 116 constitutes the upper electrode, and a capacitor 160 is constructed of the lower electrode, the dielectric insulating film 135 and the upper electrode P 1.
1. A manufacturing method of a semiconductor device, comprising:
forming a first wiring layer above a semiconductor substrate;
forming an insulating film above the first wiring layer;
forming a first hole in the insulating film;
forming a first metal on an internal surface of the first hole and on an upper surface of the insulating film, the first metal being connected to the first wiring;
forming a second metal layer on the first metal layer in the first hole;
forming a third metal layer on the first metal layer located on the upper surface of the insulating film;
forming a dielectric insulating film on the third metal layer; and
forming a second wiring layer on the dielectric insulating film,
wherein the first hole is located in a first area outside of a second area where the third metal layer and the second wiring layer face each other; and
the first metal layer located in the second area is flat.
2. The manufacturing method according to claim 1 , wherein the first wiring layer is a damascene wiring layer.
3. The manufacturing method according to claim 1 , wherein the first wiring layer is formed in the first area.
4. The manufacturing method according to claim 1 , further comprising:
forming a third wiring layer above the semiconductor substrate in a third area except the first area and the second area before forming the insulating film;
forming a second hole in the insulating film in the third area;
forming a fourth metal layer on an internal surface of the second hole, the fourth metal layer being connected to the third wiring layer;
forming a fifth metal layer on the fourth metal layer in the second hole;
forming the fourth wiring layer above the insulating film, the fourth wiring layer being connected to the fourth metal layer and the fifth metal layer.
5. The manufacturing method according to claim 4 , wherein:
the fourth wiring layer includes a material same as a material of the second wiring layer.
6. The manufacturing method according to claim 4 , wherein:
the second wiring layer includes a first barrier metal film, a sixth metal layer formed on the first barrier metal and a second barrier metal film formed on the sixth metal layer;
the fourth wiring layer includes a third barrier metal film, a seventh metal layer formed on the third barrier metal and a fourth barrier metal film formed on the seventh metal layer; and
materials of the first barrier metal film, the sixth metal layer and the second barrier metal film are same as materials of the third barrier metal film, the seventh metal layer and the fourth barrier metal film respectively.
7. The manufacturing method according to claim 1 , wherein:
a part of the second wiring layer is located out of the second area.
8. A manufacturing method of a semiconductor device, comprising:
forming a first wiring layer above a semiconductor substrate;
forming an insulating film above the first wiring layer;
forming a first hole in the insulating film;
forming a first metal on an internal surface of the first hole and on an upper surface of the insulating film, the first metal being connected to the first wiring;
forming a second metal layer on the first metal layer in the first hole;
forming a third metal layer on the first metal layer located on the upper surface of the insulating film;
forming a dielectric insulating film on the third metal layer; and
forming a second wiring layer on the dielectric insulating film,
wherein the first hole is located in a first area outside of a second area where the third metal layer and the second wiring layer face each other; and
whole of the first metal layer located in the second area is located on the insulating film.
9. The manufacturing method according to claim 8 , wherein the first wiring layer is a damascene wiring layer.
10. The manufacturing method according to claim 8 , wherein the first wiring layer is formed in the first area.
11. The manufacturing method according to claim 8 , further comprising:
forming a third wiring layer above the semiconductor substrate in a third area except the first area and the second area before forming the insulating film;
forming a second hole in the insulating film in the third area;
forming a fourth metal layer on an internal surface of the second hole, the fourth metal layer being connected to the third wiring layer;
forming a fifth metal layer on the fourth metal layer in the second hole;
forming the fourth wiring layer above the insulating film, the fourth wiring layer being connected to the fourth metal layer and the fifth metal layer.
12. The manufacturing method according to claim 11 , wherein:
the fourth wiring layer includes a material same as a material of the second wiring layer.
13. The manufacturing method according to claim 11 , wherein:
the second wiring layer includes a first barrier metal film, a sixth metal layer formed on the first barrier metal and a second barrier metal film formed on the sixth metal layer;
the fourth wiring layer includes a third barrier metal film, a seventh metal layer formed on the third barrier metal and a fourth barrier metal film formed on the seventh metal layer; and
materials of the first barrier metal film, the sixth metal layer and the second barrier metal film are same as materials of the third barrier metal film, the seventh metal layer and the fourth barrier metal film respectively.
14. The manufacturing method according to claim 1 , wherein:
a part of the second wiring layer is located out of the second area.