MEMS packaging scheme using dielectric fence
View Patent ↗A packaging scheme for MEMS device is provided. A method of packaging MEMS device in a semiconductor structure includes forming an insulation fence that surrounds the MEMS device on the semiconductor structure. The method further includes attaching a wafer of dielectric material to the insulation fence. The lid wafer, the insulation fence, and the semiconductor structure enclose the MEMS device.
1. A device, comprising:
a substrate;
electronic components in the substrate;
a sensor configured to interact with the electronic components in the substrate;
an enclosure positioned on the substrate, the enclosure including:
an exterior dielectric layer having a first portion, a second portion, and a third portion that couples the first portion to the second portion; and
an interior conductive layer within the exterior dielectric layer, the interior conductive layer being on the third portion and between the first portion and the second portion; and
a cover positioned on the enclosure, the cover configured to contact the first portion and the second portion of the exterior dielectric layer and the interior conductive layer to seal the sensor within the enclosure.
2. The device of claim 1 wherein in cross-section the exterior dielectric layer is U-shaped and the first portion is substantially parallel to the second portion of the exterior dielectric layer.
3. The device of claim 1 wherein a top surface of the enclosure includes a top surface of the interior conductive layer between a top surface of the first portion and a top surface of the second portion of the exterior dielectric layer.
4. The device of claim 1 wherein a bottom surface of the enclosure includes only the third portion of the exterior dielectric layer.
5. The device of claim 1 wherein a height between a top surface and a bottom surface of the enclosure has different dimensions at locations around the sensor.
6. The device of claim 1 wherein a height of the enclosure between the substrate and the cover have different dimensions at locations around the sensor.
7. The device of claim 1 wherein a portion of the sensor is above the substrate and the cover is above the substrate and above the portion of the sensor.
8. A method, comprising:
forming electronic components in a substrate;
forming a sensor configured to interact with the electronic components in the substrate;
forming an enclosure on the substrate, the enclosure including an exterior dielectric layer and an interior conductive layer, the forming of the enclosure including:
forming an opening in a sacrificial layer;
forming the exterior dielectric layer in the opening, the exterior dielectric layer lining sidewalls of the opening; and
forming the interior conductive layer on the exterior dielectric layer in the opening; and
forming a cover on the enclosure, the cover configured to contact the exterior dielectric layer and the interior conductive layer and to seal the sensor within the enclosure.
9. The method of claim 8 wherein forming the sensor occurs before forming the enclosure.
10. The method of claim 9 where forming the enclosure includes:
forming a planar top surface by removing portions of the exterior dielectric layer and the interior conductive layer, the top surface including the interior conductive layer between a first part of the exterior layer and a second part of the exterior layer.
11. The method of claim 8 wherein the sensor is a micro-electromechanical device.
12. The method of claim 8 wherein the sensor includes a first conductive material and the interior conductive layer is a second conductive material that is different from the first conductive material.
13. The device of claim 1 wherein the enclosure has a top surface, a bottom surface, a first side surface, and a second side surface, the top surface includes a first portion of the exterior dielectric layer separated from a second portion of the exterior dielectric layer by the interior conductive layer, the bottom surface including only the exterior dielectric layer, the first side surface including only the exterior dielectric layer, and the second side surface including only the exterior dielectric layer.
14. The device of claim 1 wherein the exterior dielectric layer completely surrounds the interior conductive layer, except for on a top surface of the enclosure.
15. The device of claim 14 wherein the top surface of the enclosure includes a first portion of the exterior dielectric layer separated from a second portion of the exterior dielectric layer by the interior conductive layer.