Strained transistor structure
A strain enhanced transistor is provided having a strain inducing layer overlying a gate electrode. The gate electrode has sloped sidewalls over the channel region of the transistor.
1. A method comprising: forming a gate dielectric on a substrate; forming a trapezoidal gate electrode having a lower surface abutting the gate dielectric, an upper surface, and sloped sidewalls, the upper surface being narrower than the lower surface; using the trapezoidal gate electrode as a mask, implanting dopant ions into the substrate to form source and drain regions; and forming a strain-inducing layer overlying the trapezoidal gate electrode and the source and drain regions, the strain-inducing layer configured to induce strain in a channel region, wherein the trapezoidal gate includes a rectangular extension for use as a contact landing pad, and further comprising forming a metal contact to the trapezoidal gate, the metal contact intersecting the contact landing pad.
2. A method of forming a strained transistor structure, the method comprising: forming a gate dielectric on a monocrystalline semiconductor substrate; forming a gate electrode on the gate dielectric such that the gate electrode has a conductive portion over a channel region of the semiconductor substrate, the conductive portion of the gate electrode having inwardly sloping sidewalls and a bottom cross-section length that is greater than a top cross-section length; implanting dopant into the monocrystalline semiconductor substrate to form source and drain regions adjacent the channel region; and forming over the gate electrode a strain inducing layer configured to induce strain on the channel region, wherein the implanting dopant step comprises: forming lightly doped regions in the source and drain regions; forming sidewall spacers including dielectric material on at least part of the inwardly sloping sidewalls of the gate electrode; and forming heavily doped regions in the source and drain regions, and wherein during the forming lightly doped regions step, at least a portion of the dopant passes through the inwardly sloping sidewalls of the gate electrode to form, under the gate electrode, a dopant concentration gradient inversely proportional to a vertical thickness of the inwardly sloping sidewalls of the gate electrode.
3. The method of claim 2 , wherein the forming of the gate electrode includes wet etching the gate electrode so that the inwardly sloping sidewalls of the gate electrode make an angle Ø in a range between 20° and 45° with respect to a vertical direction.
4. The method of claim 2 , wherein the forming of the gate electrode includes wet etching and dry etching the gate electrode.
5. The method of claim 2 , wherein the forming of the gate electrode comprises forming a gate contact region adjacent the conductive portion over the channel region, such that the gate contact region has substantially vertical sidewalls.
6. The method of claim 2 comprising forming a contact plug structure on the gate electrode, such that at least a part of the contact plug is on the inward sloping sidewalls of the gate electrode.
7. A method comprising: forming a gate dielectric on the substrate; forming a trapezoidal gate electrode having a lower surface abutting the gate dielectric, an upper surface, and sloped sidewalls, the upper surface being narrower than the lower surface; using the trapezoidal gate electrode as a mask, implanting dopant ions into the substrate to form source and drain regions; forming a strain-inducing layer overlying the trapezoidal gate electrode and the source and drain regions, the strain-inducing layer configured to induce strain in a channel region; and forming a metal contact to the trapezoidal gate, the metal contact intersecting the sloped sidewalls.
8. The method of claim 7 wherein the trapezoidal gate is made of metal.
9. The method of claim 7 wherein the strain-inducing layer is made of a dielectric material deposited so as to exhibit tensile stress.
10. The method of claim 7 wherein the strain-inducing layer is made of a dielectric material deposited so as to exhibit compressive stress.
11. The method of claim 7 wherein the sloped sidewalls form a slope angle of less than 45 degrees relative to a surface normal.
12. The method of claim 7 , further comprising, prior to forming the strain-inducing conformal layer, forming sidewall spacers in contact with the sloped sidewalls.
13. The method of claim 12 wherein the sidewall spacers have a curved profile.
14. The method of claim 7 , further comprising, prior to forming the strain-inducing conformal layer, annealing the substrate to activate the dopant ions.
15. The method of claim 14 , wherein annealing the substrate diffuses the source and drain regions laterally to overlap the trapezoidal gate.