Semiconductor device and method of manufacturing semiconductor device
The semiconductor device includes a capacitor including a plurality of interconnection layers stacked over each other, the plurality of interconnection layers each including a plurality of electrode patterns extended in a first direction, a plurality of via parts provided between the plurality of interconnection layers and electrically interconnecting the plurality of the electrode patterns between the interconnection layers adjacent to each other, and an insulating films formed between the plurality of interconnection layers and the plurality of via parts. Each of the plurality of via parts is laid out, offset from a center of the electrode pattern in a second direction intersecting the first direction, and the plurality of electrode patterns has a larger line width at parts where the via parts are connected to, and a distance between the electrode patterns and the adjacent electrode patterns is reduced at the parts.
1. A method of manufacturing a semiconductor device comprising:
forming over a semiconductor substrate a first interconnection layer including a first electrode pattern and a second electrode pattern extended in a first direction;
forming an insulating film over the semiconductor substrate with the first interconnection layer formed;
forming in the insulating film a first via-hole down to the first electrode pattern and a second via-hole down to the second electrode pattern;
forming in a surface side of the insulating film a first interconnection trench position above the first electrode pattern, connected to the first via-hole and extended in the first direction, and a second interconnection trench position above the second electrode pattern, connect to the second via-hole and extended in the first direction; and
burying in the first via-hole, the second via-hole, the first interconnection trench and the second interconnection trench a conductive film to form a second interconnection layer including a third electrode pattern electrically connected to the first electrode pattern via the first via-hole and a fourth electrode pattern electrically connected to the second electrode pattern via the second via-hole,
in forming the first via-hole and the second via-hole, the first via-hole being laid out, offset from a center of the first electrode pattern in a second direction intersecting the first direction, and the second via-hole being laid out, offset from a center of the second electrode pattern in the second direction, wherein
an increase of a line width of the third electrode pattern at the first via-hole correspond to an offset amount of the first via-hole with respect to the center of the first electrode pattern and an increase of a line width of the fourth electrode pattern at the second via-hole correspond to an offset amount of the second via-hole with respect to the center of the second electrode pattern.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein
in forming the first via-hole and the second via-hole, a plurality of the first via-hole and a plurality of the second via-hole are formed, wherein
the plurality of the first via-hole includes the first via-hole laid out, offset from the center of the first electrode patterns in the second direction and the first via-hole laid out, offset in a third direction opposite to the second direction, and
a plurality of the second via-hole includes the second via-hole laid out, offset from the center of the second electrode pattern in the second direction and the second via-hole laid out, offset in the third direction.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein
line widths of the first electrode pattern and the second electrode pattern and a distance between the first electrode pattern and the second electrode pattern, widths of the first interconnection trench and the second interconnection trench and a distance between the first interconnection trench and the second interconnection trench, and widths of the first via-hole and the second via-hole and a distance between the first via-hole and the second via-hole are formed in minimum processing dimensions decided by design rules.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein
in forming the first via-hole and the second via-hole, a reticle having patterns of the first via-hole and the second via-hole out of hole patterns to be connected to the first interconnection layer are laid out, selectively offset is prepared, and the first via-hole and the second via-hole are formed by photolithography using the reticle.
5. The method of manufacturing a semiconductor device according to claim 4 , wherein
the hole patterns include a pattern of a third via-hole arriving at an interconnection pattern of the first interconnection layer other than the first electrode pattern and the second electrode pattern,
the third via-hole is laid out, not intentionally offset with respect to the interconnection pattern.