Granted Patent B2

US 9,547,231 · App. 14/229,859 · Granted Jan 17, 2017

Abstract

Claims (57)

1. A semiconductor assembly, comprising:

an optical mask for use in fabricating a semiconductor device, the optical mask having an optical mask substrate comprising a first alignment indicator;

a wafer comprising a second alignment indicator; and

a refractive alignment lens etched into a glass layer, the glass layer having a first surface that is in contact with the optical mask substrate and an opposing surface that is in contact with the wafer to facilitate a visual alignment of the first alignment indicator with the second alignment indicator, wherein the refractive alignment lens is etched at a location on the glass layer that is aligned with a viewing axis extending between the first alignment indicator and the second alignment indicator, the location selected to configure the alignment lens to project an image of the second alignment indicator into the optical mask substrate and provide an effective distance that is smaller than an actual distance between the first alignment indicator and the second alignment indicator for overcoming a parallax effect when the second alignment indicator is viewed along the viewing axis during the visual alignment.

2. A method, comprising:

providing an optical mask substrate, the optical mask substrate transparent to a predetermined wavelength of light;

depositing a first layer on a surface of the optical mask substrate, the first layer consisting of a material opaque to the predetermined wavelength;

forming an aperture in the first layer;

depositing a second layer on a surface of the first layer, the second layer consisting of a material transparent to the predetermined wavelength;

depositing a third layer on a surface of the second layer, the third layer consisting of photoresist material;

patterning the third layer to produce a disc-shaped region;

heating the third layer until the disc-shaped region reflows into a lens-shaped region and cross-links;

depositing a fourth layer on a surface of the third layer, the fourth layer embedding the disc-shaped region, the fourth layer consisting of photoresist material;

patterning the fourth layer to produce a cavity extending to a surface of the lens-shaped region, an end of the cavity including the surface of the lens-shaped region; and

dry etching the end of the cavity until the second layer develops a shape corresponding to the lens-shaped region, whereby the optical mask substrate and the first and second layers together define a optical mask device.

3. The method of claim 2 , wherein the optical mask substrate consists of fused silica.

4. The method of claim 2 , wherein the first layer consists of polysilicon.

5. The method of claim 2 , wherein the second layer consists of borophosphosilicate glass (BPSG).

6. The method of claim 2 , wherein the third layer consists of a positive photoresist polymer.

7. The method of claim 2 , wherein heating the third comprises heating the third layer to at least 250 C.

8. The method of claim 2 , wherein the fourth layer consists of a positive photoresist polymer.

9. The method of claim 2 , wherein dry etching the end of the cavity comprises reactive ion etching (RIE).

10. The method of claim 9 , wherein reactive ion etching comprises inductively coupled plasma (ICP) RIE.

11. The method of claim 2 , wherein the cavity has a diameter at least equal to a diameter of the aperture.

12. The method of claim 2 , wherein the aperture has a diameter less than a diameter of the lens-shaped region.

13. The method of claim 2 , further comprising:

providing a semiconductor wafer comprising a semiconductor device;

depositing a layer of photoresist material over the semiconductor device; and

aligning the optical mask device with the semiconductor wafer;

directing light through the optical mask device onto the photoresist material on the semiconductor wafer; and

developing the photoresist material on the semiconductor wafer.

14. The method of claim 13 , wherein aligning the optical mask device with the semiconductor wafer comprises:

providing a layer defining an alignment lens between the optical mask device and the semiconductor wafer, wherein the alignment lens is one of refractive and diffractive; and

aligning a mask alignment indicator on the optical mask device with an image of a wafer alignment indicator on the semiconductor wafer, the image of the wafer alignment indicator projected into the optical mask device by the alignment lens.

15. The method of claim 14 , wherein the layer defining the lens comprises a Fresnel pattern.

16. A method, comprising:

providing an optical mask substrate, the optical mask substrate transparent to a predetermined wavelength of light;

depositing a first layer on a surface of the optical mask substrate, the first layer consisting of a material opaque to the predetermined wavelength;

forming an aperture in the first layer;

depositing a second layer on a surface of the first layer, the second layer consisting of a material transparent to the predetermined wavelength;

depositing a third layer on a surface of the second layer, the third layer consisting of photoresist material;

patterning the third layer to produce a disc-shaped region;

heating the third layer until the disc-shaped region reflows into a lens-shaped region and cross-links;

depositing a fourth layer on a surface of the third layer, the fourth layer embedding the disc-shaped region, the fourth layer consisting of photoresist material;

patterning the fourth layer to produce a cavity extending to a surface of the lens-shaped region, an end of the cavity including the surface of the lens-shaped region; and reactive ion etching (RIE) the end of the cavity until the second layer develops a shape corresponding to the lens-shaped region, whereby the optical mask substrate and the first and second layers together define an optical mask device;

providing a semiconductor wafer comprising a semiconductor device;

depositing a layer of photoresist material over the semiconductor device;

providing a layer defining an alignment lens between the optical mask device and the semiconductor wafer, wherein the alignment lens is one of refractive and diffractive; and

aligning an optical mask device alignment indicator on the optical mask device with an image of a wafer alignment indicator on the semiconductor wafer, the image of the wafer alignment indicator projected into the optical mask device by the alignment lens;

directing light through the mask onto the photoresist material on the semiconductor wafer; and

developing the photoresist material on the semiconductor wafer.

17. The method of claim 16 , wherein the optical mask substrate consists of fused silica.

18. The method of claim 16 , wherein the first layer consists of polysilicon.

19. The method of claim 16 , wherein the second layer consists of borophosphosilicate glass (BPSG).

20. The method of claim 16 , wherein the third layer consists of a positive photoresist polymer.

21. The method of claim 16 , wherein heating the third comprises heating the third layer to at least 250 C.

22. The method of claim 16 , wherein the fourth layer consists of a positive photoresist polymer.

Assignments (8)