Semiconductor device
View Patent ↗Provided is a semiconductor device wherein chip size is reduced, while potential on the dummy word lines is fixed. The semiconductor device is provided with: a memory cell array including a plurality of memory cells, a plurality of word lines for controlling memory operations of the plurality of memory cells, and a plurality of dummy word lines that do not participate in memory operations of the plurality of memory cells; and a guard ring surrounding the memory cell array. The plurality of dummy word lines are electrically fixed to the guard ring.
1. A semiconductor device comprising:
a memory cell array including a plurality of memory cells, a plurality of word lines which control storage operations of the abovementioned plurality of memory cells, and a plurality of dummy word lines which do not contribute to the storage operations of the abovementioned plurality of memory cells; and
a guard ring surrounding the abovementioned memory cell array,
the abovementioned plurality of dummy word lines being electrically fixed to the abovementioned guard ring.
2. The semiconductor device as claimed in claim 1 , characterized in that the abovementioned plurality of word lines and the abovementioned plurality of dummy word lines are disposed as gate electrodes of embedded gate type transistors formed on a semiconductor substrate.
3. The semiconductor device as claimed in claim 1 , characterized in that the abovementioned guard ring is formed by means of a diffusion layer surrounding the abovementioned memory cell array.
4. The semiconductor device as claimed in claim 1 , characterized in that the abovementioned guard ring is a wiring line guard ring in which the periphery of the abovementioned memory cell array is surrounded by a metal wiring line.