Gate electrode of a semiconductor device, and method for producing same
View Patent ↗A semiconductor device includes a semiconductor substrate; a gate insulating film provided on the semiconductor substrate; a gate electrode having a metal layer, a metal oxide layer and a silicon layer containing a dopant, provided sequentially on the gate insulating film; and a transistor having a gate insulating film and a gate electrode.
1. A semiconductor device comprising:
a semiconductor substrate;
a gate insulating film provided on the semiconductor substrate;
a gate electrode including a metal layer, a metal oxide layer and a silicon layer containing a dopant formed directly on the metal oxide layer, provided sequentially on the gate insulating film; and
a transistor including the gate insulating film and the gate electrode.
2. The semiconductor device as claimed in claim 1 , wherein a film thickness of the metal oxide layer is 0.1 to 1.1 nm.
3. The semiconductor device as claimed in claim 1 wherein the metal layer comprises a titanium nitride layer, a tungsten layer or a ruthenium layer.
4. The semiconductor device as claimed in claim 1 wherein the metal oxide layer comprises a titanium oxide layer, a tungsten oxide layer or a ruthenium oxide layer.
5. The semiconductor device as claimed in claim 1 , wherein the silicon layer is an amorphous silicon layer or a polysilicon layer.
6. The semiconductor device as claimed in claim 1 , wherein the gate electrode further comprises a tungsten nitride layer and a tungsten layer provided sequentially on the silicon layer.
7. The semiconductor device as claimed in claim 1 , wherein the gate insulating film comprises a silicon oxide layer provided on the semiconductor substrate, and a high-dielectric constant insulating layer provided on the silicon oxide layer.
8. The semiconductor device as claimed in claim 1 , wherein the high-dielectric constant insulating layer contains one or more insulating materials selected from the group comprising HfSiON, ZrO 2 , Ta 2 O 5 , Nb 2 O 5 , Al 2 O 3 , HfO 2 , ScO 3 , Y 2 O 3 , La 2 O 3 , CeO 3 , Pr 2 O 3 , Nd 2 O 3 , Sm 2 O 3 , Eu 2 O 3 , Gd 2 O 3 , Tb 2 O 3 , Dy 2 O 3 , Ho 2 O 3 , Er 2 O 3 , Tm 2 O 3 , Yb 2 O 3 , and Lu 2 O 3 .
9. A method of manufacturing a semiconductor device, comprising:
forming a gate insulating film on a semiconductor substrate,
forming a metal layer on the gate insulating film,
forming a metal oxide layer on the metal layer,
forming an amorphous silicon layer containing a dopant directly on the metal oxide layer, and
forming a gate electrode by patterning the metal layer, the metal oxide layer and the amorphous silicon layer.
10. The method of manufacturing a semiconductor device as claimed in claim 9 , wherein a film thickness of the metal oxide layer is 0.1 to 1 nm.
11. The method of manufacturing a semiconductor device as claimed in claim 9 , wherein the forming of the metal oxide layer comprises the oxidizing the outer surface of the metal layer in an atmosphere containing oxygen.
12. The method of manufacturing a semiconductor device as claimed in claim 9 , wherein the metal layer comprises a titanium nitride layer, a tungsten layer or a ruthenium layer.
13. The method of manufacturing a semiconductor device as claimed in claim 9 , wherein the metal oxide layer comprises a titanium oxide layer, a tungsten oxide layer or a ruthenium oxide layer.
14. The method of manufacturing a semiconductor device as claimed in claim 9 , further comprising, after the forming of the amorphous silicon layer, heat-treating the amorphous silicon layer to convert the amorphous silicon layer into a polysilicon layer.
15. The method of manufacturing a semiconductor device as claimed in claim 9 , further comprising, after the forming of the amorphous silicon layer, forming a tungsten nitride layer on the amorphous silicon layer, and forming a tungsten layer on the tungsten nitride layer.
16. The method of manufacturing a semiconductor device as claimed in claim 9 , wherein the forming of the gate insulating film comprises forming a silicon oxide layer on the semiconductor substrate, and forming a high-dielectric constant insulating layer on the silicon oxide layer.
17. The method of manufacturing a semiconductor device as claimed in claim 9 , wherein the high-dielectric constant insulating layer contains one or more insulating materials selected from the group comprising HfSiON, ZrO 2 , Ta 2 O 5 , Nb 2 O 5 , Al 2 O 3 , HfO 2 , ScO 3 , Y 2 O 3 , La 2 O 3 , CeO 3 , Pr 2 O 3 , Nd 2 O 3 , Sm 2 O 3 , Eu 2 O 3 , Gd 2 O 3 , Tb 2 O 3 , Dy 2 O 3 , Ho 2 O 3 , Er 2 O 3 , Tm 2 O 3 , Yb 2 O 3 , and Lu 2 O 3 .